TY - GEN
T1 - Towards Fabrication of High-Tuning-Range Liquid Crystals High-Aspect-Ratio Coplanar Waveguide Phase Shifter by LIGA, DRIE and Laser Ablation
AU - Li, Jinfeng
N1 - Publisher Copyright:
© 2023 IEEE.
PY - 2023
Y1 - 2023
N2 - The increasing demand for high-performance (tunability) millimeter-wave reconfigurable devices has led to a growing interest in the development of high-resolution fabrication techniques for addressing the challenge and need of manufacturing high-aspect-ratio planar transmission line structures, e.g., a tall-copper-profile coplanar waveguide (CPW) featuring an enhanced tunability possibility for a liquid crystals (LCs)-enabled 0-360° continuously variable phase shifter targeted 60-90 GHz applications. For the first time, this study evaluates the potential approaches towards the fabrication of LCs-based top-electrode-free fully-symmetric CPW structures by leveraging the insights from LIGA (Lithographie, Galvanik und Abformung, i.e., German acronym for lithography, electroplating, and molding), deep reactive ion etching (DRIE), and laser ablation. Specifically, our prototype of a 70 μm-thick CPW demo fabricated by laser ablation is presented.
AB - The increasing demand for high-performance (tunability) millimeter-wave reconfigurable devices has led to a growing interest in the development of high-resolution fabrication techniques for addressing the challenge and need of manufacturing high-aspect-ratio planar transmission line structures, e.g., a tall-copper-profile coplanar waveguide (CPW) featuring an enhanced tunability possibility for a liquid crystals (LCs)-enabled 0-360° continuously variable phase shifter targeted 60-90 GHz applications. For the first time, this study evaluates the potential approaches towards the fabrication of LCs-based top-electrode-free fully-symmetric CPW structures by leveraging the insights from LIGA (Lithographie, Galvanik und Abformung, i.e., German acronym for lithography, electroplating, and molding), deep reactive ion etching (DRIE), and laser ablation. Specifically, our prototype of a 70 μm-thick CPW demo fabricated by laser ablation is presented.
KW - CPW
KW - DRIE
KW - high aspect ratio
KW - laser ablation
KW - LIGA
KW - liquid crystal
KW - phase shifter
KW - reconfigurable
KW - X-ray LIGA
UR - http://www.scopus.com/inward/record.url?scp=85186497972&partnerID=8YFLogxK
U2 - 10.1109/CSRSWTC60855.2023.10427011
DO - 10.1109/CSRSWTC60855.2023.10427011
M3 - Conference contribution
AN - SCOPUS:85186497972
T3 - Proceedings - 2023 Cross Strait Radio Science and Wireless Technology Conference, CSRSWTC 2023
BT - Proceedings - 2023 Cross Strait Radio Science and Wireless Technology Conference, CSRSWTC 2023
PB - Institute of Electrical and Electronics Engineers Inc.
T2 - 2023 Cross Strait Radio Science and Wireless Technology Conference, CSRSWTC 2023
Y2 - 10 November 2023 through 13 November 2023
ER -