Towards automated micromachining of PMMA micro channels using CO ₂ laser and sacrificial mask process

A novel system for 3D microchannel fabrication based on CO₂ laser-micromachining is presented. The system consists of a CO₂ laser focusing system and a 3D precision positioning platform. The CO₂ laser focusing system can regulate a laser beam which is of appropriate energy level and of micron dimension in beam diameter. The fabrication of 3D microchannel system in PMMA (polymethyl methacrylate) can be realized by controlling the CO₂ laser and a 3-axis platform with micron-resolution movement. A special 'sacrificial mask' process was used to produce translucent channels of micron dimensions with low surface roughness using the developed system. The effectiveness of our developed system is confirmed by experimental results. Potentially, our developed system can be automated to produce 3D micro channels in PMMA substrates without the requirement for the costly and time-consuming lithography and hot-embossing processes that are needed currently.