@inproceedings{679066603182487481c74eb2a8e79eb1,
title = "Tolerance analysis of a super-resolution optical system",
abstract = "Pupil filtering is a widely used super-resolving technique. This technique utilizes one or more diffractive superresolution elements (DSEs) to break the diffraction limit. This paper focused on the tolerance analysis of DSEs. Although the analysis in this paper was based on a specific super-resolution system, it was sufficient to demonstrate our efforts and make some conclusions. Generally, two types of tolerances have been taken into consideration. One is DSE's position tolerance. The other is the tolerance of DSE's phase transmittance. With the presented method, it is able to evaluate the influence of DSE tolerances on a super-resolution optical system, and thus to guide practical fabrication.",
keywords = "DSE, pupil filtering, super-resolution, tolerance analysis",
author = "Weiyi Zha and Jun Chang and Weilin Chen and Haibo Yang and Xiusheng Yan",
note = "Publisher Copyright: {\textcopyright} 2014 SPIE.; International Symposium on Optoelectronic Technology and Application 2014: Imaging Spectroscopy; and Telescopes and Large Optics, IPTA 2014 ; Conference date: 13-05-2014 Through 15-05-2014",
year = "2014",
doi = "10.1117/12.2072679",
language = "English",
series = "Proceedings of SPIE - The International Society for Optical Engineering",
publisher = "SPIE",
editor = "Wenli Ma and Rolland, {Jannick P.} and Kim, {Dae Wook} and Changxiang Yan and Ligong Zheng",
booktitle = "International Symposium on Optoelectronic Technology and Application 2014",
address = "United States",
}