Thermo-mechanical reliability evaluation for microelectronic packaging using C-mode scanning acoustic microscopy

  • X. H. Guo
  • , C. G. Xu
  • , L. Yang
  • , Z. Z. Liu
  • , X. Y. Zhao
  • , H. B. Wang
  • , K. Peng

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

C-mode Scanning Acoustic Microscopy (C-SAM) is an excellent tool for nondestructive failure analysis and reliability evaluation of microelectronic packaging. During operation and thermal cycling, defects such as cracks, delamination and voids can emerge and grow under thermo-mechanical stresses caused by materials with different coefficients of thermal expansion (CTE) and mechanical properties. According to the MIL-STD-883H Microcircuits Test Method Standard, the thermal cycling test on a set of microelectronic packaging was conducted and the defects propagation of microelectronic packaging was studied experimentally using C-mode Scanning Acoustic Microscopy.

Original languageEnglish
Title of host publicationReview of Progress in Quantitative Nondestructive Evaluation, Volume 32
EditorsDale E. Chimenti, Donald O. Thompson
PublisherAmerican Institute of Physics Inc.
Pages1803-1808
Number of pages6
ISBN (Electronic)9780735411296
DOIs
Publication statusPublished - 2013
Event39th Annual Review of Progress in Quantitative Nondestructive Evaluation, QNDE 2012 - Denver, United States
Duration: 15 Jul 201220 Jul 2012

Publication series

NameAIP Conference Proceedings
Volume1511
ISSN (Print)0094-243X
ISSN (Electronic)1551-7616

Conference

Conference39th Annual Review of Progress in Quantitative Nondestructive Evaluation, QNDE 2012
Country/TerritoryUnited States
CityDenver
Period15/07/1220/07/12

Keywords

  • Microelectronic Packaging
  • Reliability
  • Thermo-Mechanical
  • and C-SAM

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