The vibration and measurement of driving mode of the two-stage decoupled micro-machined gyroscope

Yao Fenglin; Gao Shiqiao; Zhao Jie; Liu Haipeng; Niu Shaohua; Jin Lei

doi:10.21307/ijssis-2017-606

The vibration and measurement of driving mode of the two-stage decoupled micro-machined gyroscope

Yao Fenglin^*, Gao Shiqiao, Zhao Jie, Liu Haipeng, Niu Shaohua, Jin Lei

^*Corresponding author for this work

School of Mechatronical Engineering

Research output: Contribution to journal › Article › peer-review

3 Citations (Scopus)

Abstract

This paper introduces the working principle of the two-stage decoupled micro-machined gyroscope, and establishes the vibration equation of the driving mode. By solving the differential equation, the analytical solution and the amplitude-frequency characteristics of the driving mode are obtained. By the visual measurement based on high-speed photography and the post image processing, it measures the natural frequency of the driving mode of the micro-machined gyroscope. And it measures the damping coefficient in time domain and frequency domain respectively using this method. The comparison to the theoretical solution proves that the method is effective and accurate; it will help the study for the micro-machined gyroscope vibration and provides a new way to measure MEMS.

Original language	English
Pages (from-to)	1599-1616
Number of pages	18
Journal	International Journal on Smart Sensing and Intelligent Systems
Volume	6
Issue number	4
DOIs	https://doi.org/10.21307/ijssis-2017-606
Publication status	Published - Sept 2013

Keywords

Decoupled
Driving mode
Measurement
Micro-machined gyroscope
Vibration

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10.21307/ijssis-2017-606

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abstract = "This paper introduces the working principle of the two-stage decoupled micro-machined gyroscope, and establishes the vibration equation of the driving mode. By solving the differential equation, the analytical solution and the amplitude-frequency characteristics of the driving mode are obtained. By the visual measurement based on high-speed photography and the post image processing, it measures the natural frequency of the driving mode of the micro-machined gyroscope. And it measures the damping coefficient in time domain and frequency domain respectively using this method. The comparison to the theoretical solution proves that the method is effective and accurate; it will help the study for the micro-machined gyroscope vibration and provides a new way to measure MEMS.",

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AU - Fenglin, Yao

AU - Shiqiao, Gao

AU - Jie, Zhao

AU - Haipeng, Liu

AU - Shaohua, Niu

AU - Lei, Jin

PY - 2013/9

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N2 - This paper introduces the working principle of the two-stage decoupled micro-machined gyroscope, and establishes the vibration equation of the driving mode. By solving the differential equation, the analytical solution and the amplitude-frequency characteristics of the driving mode are obtained. By the visual measurement based on high-speed photography and the post image processing, it measures the natural frequency of the driving mode of the micro-machined gyroscope. And it measures the damping coefficient in time domain and frequency domain respectively using this method. The comparison to the theoretical solution proves that the method is effective and accurate; it will help the study for the micro-machined gyroscope vibration and provides a new way to measure MEMS.

AB - This paper introduces the working principle of the two-stage decoupled micro-machined gyroscope, and establishes the vibration equation of the driving mode. By solving the differential equation, the analytical solution and the amplitude-frequency characteristics of the driving mode are obtained. By the visual measurement based on high-speed photography and the post image processing, it measures the natural frequency of the driving mode of the micro-machined gyroscope. And it measures the damping coefficient in time domain and frequency domain respectively using this method. The comparison to the theoretical solution proves that the method is effective and accurate; it will help the study for the micro-machined gyroscope vibration and provides a new way to measure MEMS.

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KW - Driving mode

KW - Measurement

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KW - Vibration

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The vibration and measurement of driving mode of the two-stage decoupled micro-machined gyroscope

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Keywords

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