The tribological behaviors between fullerene-like hydrogenated carbon films produced on Si substrates, steel and Si3N4 balls

Yan Wang, Xiao Ling, Yongfu Wang*, Jun Zhao, Junyan Zhang

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

5 Citations (Scopus)

Abstract

Fullerene-like hydrogenated carbon (FL-C:H) films were prepared on Si substrates, steel and Si3N4 balls by plasma enhanced chemical vapor deposition with methane gas. The frictional behaviors of steel/FL-C:H, Si3N4/FL-C:H, F-steel/FL-C:H and F-Si3N4/FL-C:H couples were investigated and their worn surfaces were analyzed by scanning electron microscopy (SEM) and 3D surface profiles. The results showed that the F-steel/FL-C:H and F-Si3N4/FL-C:H couples had lower friction and wear than the steel/FL-C:H and Si3N4/FL-C:H ones, respectively. The tribological differences are due to the change of microstructures and accordingly mechanical properties for FL-C:H films on a Si substrate, steel and Si3N4 balls.

Original languageEnglish
Pages (from-to)518-524
Number of pages7
JournalTribology International
Volume115
DOIs
Publication statusPublished - 2017
Externally publishedYes

Keywords

  • Fullerene-like hydrogenated carbon films
  • Low friction
  • Mechanical properties
  • Wear

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