The research of a novel gyroscope based on high Q micro-resonator

Jun Liu; Xiaoqian Wang; Min Zhao; Yingzhan Yan; Pengfei Jia; Yuguang Zhang; Jie Li; Shubin Yan

doi:10.1109/NEMS.2011.6017556

The research of a novel gyroscope based on high Q micro-resonator

Jun Liu, Xiaoqian Wang, Min Zhao, Yingzhan Yan, Pengfei Jia, Yuguang Zhang, Jie Li, Shubin Yan^*

^*Corresponding author for this work

North University of China

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

2 Citations (Scopus)

Abstract

Optical microcavities confine light to small model volumes and have ultrahigh quality factor (Q), especially microtoroid cavities, having very broad application prospects. In this paper, a micro-optical-electro-mechanical system (MOEMS) gyroscope was developed taking a new optical microcavity-planar microdisk cavity as the core sensing element. To obtain resonance curve, a resonant cavity proof-of-principle experiment was performed. As the light source and planar microdisk cavity dimensions have a decisive influence on the Q value of microcavity and angular rate measurement limit of gyroscope, a method was discussed that using traditional F-P cavity resonance curve for optimization of planar microdisk cavity geometric parameters.

Original language	English
Title of host publication	NEMS 2011 - 6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems
Pages	1132-1135
Number of pages	4
DOIs	https://doi.org/10.1109/NEMS.2011.6017556
Publication status	Published - 2011
Externally published	Yes
Event	6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2011 - Kaohsiung, Taiwan, Province of China Duration: 20 Feb 2011 → 23 Feb 2011

Publication series

Name	NEMS 2011 - 6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems

Conference

Conference	6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2011
Country/Territory	Taiwan, Province of China
City	Kaohsiung
Period	20/02/11 → 23/02/11

Keywords

F-P cavity
MOEMS gyroscope
Planar microdisk cavity
Principle verified

Access to Document

10.1109/NEMS.2011.6017556

Cite this

Liu, J., Wang, X., Zhao, M., Yan, Y., Jia, P., Zhang, Y., Li, J., & Yan, S. (2011). The research of a novel gyroscope based on high Q micro-resonator. In NEMS 2011 - 6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (pp. 1132-1135). Article 6017556 (NEMS 2011 - 6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems). https://doi.org/10.1109/NEMS.2011.6017556

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title = "The research of a novel gyroscope based on high Q micro-resonator",

abstract = "Optical microcavities confine light to small model volumes and have ultrahigh quality factor (Q), especially microtoroid cavities, having very broad application prospects. In this paper, a micro-optical-electro-mechanical system (MOEMS) gyroscope was developed taking a new optical microcavity-planar microdisk cavity as the core sensing element. To obtain resonance curve, a resonant cavity proof-of-principle experiment was performed. As the light source and planar microdisk cavity dimensions have a decisive influence on the Q value of microcavity and angular rate measurement limit of gyroscope, a method was discussed that using traditional F-P cavity resonance curve for optimization of planar microdisk cavity geometric parameters.",

keywords = "F-P cavity, MOEMS gyroscope, Planar microdisk cavity, Principle verified",

author = "Jun Liu and Xiaoqian Wang and Min Zhao and Yingzhan Yan and Pengfei Jia and Yuguang Zhang and Jie Li and Shubin Yan",

year = "2011",

doi = "10.1109/NEMS.2011.6017556",

language = "English",

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series = "NEMS 2011 - 6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems",

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note = "6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2011 ; Conference date: 20-02-2011 Through 23-02-2011",

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Liu, J, Wang, X, Zhao, M, Yan, Y, Jia, P, Zhang, Y, Li, J & Yan, S 2011, The research of a novel gyroscope based on high Q micro-resonator. in NEMS 2011 - 6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems., 6017556, NEMS 2011 - 6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, pp. 1132-1135, 6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2011, Kaohsiung, Taiwan, Province of China, 20/02/11. https://doi.org/10.1109/NEMS.2011.6017556

The research of a novel gyroscope based on high Q micro-resonator. / Liu, Jun; Wang, Xiaoqian; Zhao, Min et al.
NEMS 2011 - 6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems. 2011. p. 1132-1135 6017556 (NEMS 2011 - 6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

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AU - Zhang, Yuguang

AU - Li, Jie

AU - Yan, Shubin

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AB - Optical microcavities confine light to small model volumes and have ultrahigh quality factor (Q), especially microtoroid cavities, having very broad application prospects. In this paper, a micro-optical-electro-mechanical system (MOEMS) gyroscope was developed taking a new optical microcavity-planar microdisk cavity as the core sensing element. To obtain resonance curve, a resonant cavity proof-of-principle experiment was performed. As the light source and planar microdisk cavity dimensions have a decisive influence on the Q value of microcavity and angular rate measurement limit of gyroscope, a method was discussed that using traditional F-P cavity resonance curve for optimization of planar microdisk cavity geometric parameters.

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Liu J, Wang X, Zhao M, Yan Y, Jia P, Zhang Y et al. The research of a novel gyroscope based on high Q micro-resonator. In NEMS 2011 - 6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems. 2011. p. 1132-1135. 6017556. (NEMS 2011 - 6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems). doi: 10.1109/NEMS.2011.6017556

The research of a novel gyroscope based on high Q micro-resonator

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Keywords

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