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The impact response characteristics research of the multilayer structure, cantilever-type electrothermal actuator based on MEMS

  • Nanjing University of Science and Technology
  • Beijing Institute of Technology

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

To study the impact response characteristics of multilayer structure, cantilever-type electrothermal actuators based on MEMS, a composite cantilever-beam model consisting of two layers of materials, SiO2 and Al, is built. By using the engineer mechanics theory, the von mise stress under the impacts in the fuze system can be obtained. Meanwhile, the Finite Element Method (FEM) simulation is made to get the deformation displacement of the fixed end and the von mises stress distribution of the model. Besides, the natural frequency response is studied. The results present the actuator's response characteristics of impacts in the fuze system.

Original languageEnglish
Title of host publicationMaterial Science and MEMS Production
Pages87-92
Number of pages6
DOIs
Publication statusPublished - 2014
Event2014 Conference on MEMS and Nanotechnology, MEMS-NANO 2014 - Shenzhen, China
Duration: 23 Jan 201424 Jan 2014

Publication series

NameAdvanced Materials Research
Volume901
ISSN (Print)1022-6680

Conference

Conference2014 Conference on MEMS and Nanotechnology, MEMS-NANO 2014
Country/TerritoryChina
CityShenzhen
Period23/01/1424/01/14

Keywords

  • Cantilever beam
  • Electrothermal actuator
  • Impact response
  • Natural frequency

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