TY - GEN
T1 - The impact response characteristics research of the multilayer structure, cantilever-type electrothermal actuator based on MEMS
AU - Wang, Ya He
AU - Shen, Yue Yue
AU - Lv, Chao
PY - 2014
Y1 - 2014
N2 - To study the impact response characteristics of multilayer structure, cantilever-type electrothermal actuators based on MEMS, a composite cantilever-beam model consisting of two layers of materials, SiO2 and Al, is built. By using the engineer mechanics theory, the von mise stress under the impacts in the fuze system can be obtained. Meanwhile, the Finite Element Method (FEM) simulation is made to get the deformation displacement of the fixed end and the von mises stress distribution of the model. Besides, the natural frequency response is studied. The results present the actuator's response characteristics of impacts in the fuze system.
AB - To study the impact response characteristics of multilayer structure, cantilever-type electrothermal actuators based on MEMS, a composite cantilever-beam model consisting of two layers of materials, SiO2 and Al, is built. By using the engineer mechanics theory, the von mise stress under the impacts in the fuze system can be obtained. Meanwhile, the Finite Element Method (FEM) simulation is made to get the deformation displacement of the fixed end and the von mises stress distribution of the model. Besides, the natural frequency response is studied. The results present the actuator's response characteristics of impacts in the fuze system.
KW - Cantilever beam
KW - Electrothermal actuator
KW - Impact response
KW - Natural frequency
UR - https://www.scopus.com/pages/publications/84896857868
U2 - 10.4028/www.scientific.net/AMR.901.87
DO - 10.4028/www.scientific.net/AMR.901.87
M3 - Conference contribution
AN - SCOPUS:84896857868
SN - 9783038350477
T3 - Advanced Materials Research
SP - 87
EP - 92
BT - Material Science and MEMS Production
T2 - 2014 Conference on MEMS and Nanotechnology, MEMS-NANO 2014
Y2 - 23 January 2014 through 24 January 2014
ER -