Abstract
We investigate the focusing action of refractive microlens based on the rigorous electromagnetic theory by boundary element method. We numerically simulate total electric-field patterns, the electric-field intensity distributions on the focal plane, and their diffractive efficiencies at the focal spots for describing the focusing behaviours of these microlenses with continuous and multilevel surface-envelopes. Focusing action of incident beam with a certain angle of inclination is indagated as well. The present numerical and graphical results may provide an useful information for the analysis and the design of refractive elements in micro-optics.
| Original language | English |
|---|---|
| Article number | 81 |
| Pages (from-to) | 210-220 |
| Number of pages | 11 |
| Journal | Proceedings of SPIE - The International Society for Optical Engineering |
| Volume | 5856 PART I |
| DOIs | |
| Publication status | Published - 2005 |
| Externally published | Yes |
| Event | Optical Measurement Systems for Industrial Inspection IV - Munich, Germany Duration: 13 Jun 2005 → 17 Jun 2005 |
Keywords
- Boundary element method
- Focusing action
- Refractive microlens
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