The fabrication of 3D aspherical silicon microlenses using a shadow mask

J. Zhu; S. J. Chen; C. Y. Lin; J. Oiler; H. Wang; Y. C. Chen; H. Yu

doi:10.1109/TRANSDUCERS.2011.5969562

The fabrication of 3D aspherical silicon microlenses using a shadow mask

J. Zhu
, S. J. Chen
, C. Y. Lin
, J. Oiler
, H. Wang
, Y. C. Chen
, H. Yu^*

^*Corresponding author for this work

Arizona State University
University of Southern California
National Central University

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

1 Citation (Scopus)

Abstract

This work explores a new technique for 3D aspherical Si microlens fabrication using a shadow mask. With the shadow mask, a convex aspherical SiO ₂ layer is sputter deposited on a Si wafer due to the anisotropy of deposition. The shape of the SiO ₂ is transferred to Si by DRIE to form the aspherical microlens. Microlenses with controllable apertures (0.4μmm - 2mm in diameter) and focal lengths (1mm - 12mm) can be fabricated using this simple, mass-production compatible and cost-effective method. The optical simulation verified the focal effect of the lens, which can be applied to infrared optics. Furthermore, a self-focusing acoustic transducer is fabricated using the Si microlens as a mold, providing potential good self-focusing effect for actuations and sensing.

Original language	English
Title of host publication	2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11
Pages	2370-2373
Number of pages	4
DOIs	https://doi.org/10.1109/TRANSDUCERS.2011.5969562
Publication status	Published - 2011
Externally published	Yes
Event	2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11 - Beijing, China Duration: 5 Jun 2011 → 9 Jun 2011

Publication series

Name	2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11

Conference

Conference	2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11
Country/Territory	China
City	Beijing
Period	5/06/11 → 9/06/11

Keywords

Acoustic transducer
Infrared optics
Microlens
Shadow mask

Access to Document

10.1109/TRANSDUCERS.2011.5969562

Cite this

Zhu, J., Chen, S. J., Lin, C. Y., Oiler, J., Wang, H., Chen, Y. C., & Yu, H. (2011). The fabrication of 3D aspherical silicon microlenses using a shadow mask. In 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11 (pp. 2370-2373). Article 5969562 (2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11). https://doi.org/10.1109/TRANSDUCERS.2011.5969562

@inproceedings{10bff93d20b84c7492ec72e2f6fd4c87,

title = "The fabrication of 3D aspherical silicon microlenses using a shadow mask",

abstract = "This work explores a new technique for 3D aspherical Si microlens fabrication using a shadow mask. With the shadow mask, a convex aspherical SiO 2 layer is sputter deposited on a Si wafer due to the anisotropy of deposition. The shape of the SiO 2 is transferred to Si by DRIE to form the aspherical microlens. Microlenses with controllable apertures (0.4μmm - 2mm in diameter) and focal lengths (1mm - 12mm) can be fabricated using this simple, mass-production compatible and cost-effective method. The optical simulation verified the focal effect of the lens, which can be applied to infrared optics. Furthermore, a self-focusing acoustic transducer is fabricated using the Si microlens as a mold, providing potential good self-focusing effect for actuations and sensing.",

keywords = "Acoustic transducer, Infrared optics, Microlens, Shadow mask",

author = "J. Zhu and Chen, \{S. J.\} and Lin, \{C. Y.\} and J. Oiler and H. Wang and Chen, \{Y. C.\} and H. Yu",

year = "2011",

doi = "10.1109/TRANSDUCERS.2011.5969562",

language = "English",

isbn = "9781457701573",

series = "2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11",

pages = "2370--2373",

booktitle = "2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11",

note = "2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11 ; Conference date: 05-06-2011 Through 09-06-2011",

}

Zhu, J, Chen, SJ, Lin, CY, Oiler, J, Wang, H, Chen, YC & Yu, H 2011, The fabrication of 3D aspherical silicon microlenses using a shadow mask. in 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11., 5969562, 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11, pp. 2370-2373, 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11, Beijing, China, 5/06/11. https://doi.org/10.1109/TRANSDUCERS.2011.5969562

The fabrication of 3D aspherical silicon microlenses using a shadow mask. / Zhu, J.; Chen, S. J.; Lin, C. Y. et al.
2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11. 2011. p. 2370-2373 5969562 (2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

TY - GEN

T1 - The fabrication of 3D aspherical silicon microlenses using a shadow mask

AU - Zhu, J.

AU - Chen, S. J.

AU - Lin, C. Y.

AU - Oiler, J.

AU - Wang, H.

AU - Chen, Y. C.

AU - Yu, H.

PY - 2011

Y1 - 2011

N2 - This work explores a new technique for 3D aspherical Si microlens fabrication using a shadow mask. With the shadow mask, a convex aspherical SiO 2 layer is sputter deposited on a Si wafer due to the anisotropy of deposition. The shape of the SiO 2 is transferred to Si by DRIE to form the aspherical microlens. Microlenses with controllable apertures (0.4μmm - 2mm in diameter) and focal lengths (1mm - 12mm) can be fabricated using this simple, mass-production compatible and cost-effective method. The optical simulation verified the focal effect of the lens, which can be applied to infrared optics. Furthermore, a self-focusing acoustic transducer is fabricated using the Si microlens as a mold, providing potential good self-focusing effect for actuations and sensing.

AB - This work explores a new technique for 3D aspherical Si microlens fabrication using a shadow mask. With the shadow mask, a convex aspherical SiO 2 layer is sputter deposited on a Si wafer due to the anisotropy of deposition. The shape of the SiO 2 is transferred to Si by DRIE to form the aspherical microlens. Microlenses with controllable apertures (0.4μmm - 2mm in diameter) and focal lengths (1mm - 12mm) can be fabricated using this simple, mass-production compatible and cost-effective method. The optical simulation verified the focal effect of the lens, which can be applied to infrared optics. Furthermore, a self-focusing acoustic transducer is fabricated using the Si microlens as a mold, providing potential good self-focusing effect for actuations and sensing.

KW - Acoustic transducer

KW - Infrared optics

KW - Microlens

KW - Shadow mask

UR - https://www.scopus.com/pages/publications/80052107106

U2 - 10.1109/TRANSDUCERS.2011.5969562

DO - 10.1109/TRANSDUCERS.2011.5969562

M3 - Conference contribution

AN - SCOPUS:80052107106

SN - 9781457701573

T3 - 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11

SP - 2370

EP - 2373

BT - 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11

T2 - 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11

Y2 - 5 June 2011 through 9 June 2011

ER -

Zhu J, Chen SJ, Lin CY, Oiler J, Wang H, Chen YC et al. The fabrication of 3D aspherical silicon microlenses using a shadow mask. In 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11. 2011. p. 2370-2373. 5969562. (2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11). doi: 10.1109/TRANSDUCERS.2011.5969562

The fabrication of 3D aspherical silicon microlenses using a shadow mask

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