@inproceedings{18e2415b78c245e5988aa7b2c5bd49d8,
title = "The Effect of thickness on the properties of TGZO thin films for optoelectronic devices",
abstract = "Titanium and gallium co-doped zinc oxide (TGZO) thin films with highly (002)-preferred orientation were grown on glass substrates by magnetron sputtering. The effect of thickness on structure and optical properties of the deposited films were investigated by X-ray diffractometer and spectrophotometer. The results show that the polycrystalline TGZO films consist of the hexagonal crystal structures with c-axis as the preferred growth orientation normal to the substrate, and that the thickness significantly affects the crystal structure and optical properties of the thin films. It is observed that the average transmitance in the wavelength range of the visible spectrum decreases with the increase of thickness. The TGZO thin film with about 900 nm thickness exhibits the maximum grain size, the lowest dislocation density and the minimum micro strain.",
keywords = "Microstructure, Optical properties, TGZO thin films",
author = "T. Zhang and H. Wang and Zhong, \{Z. Y.\} and Yang, \{C. Y.\}",
year = "2013",
doi = "10.4028/www.scientific.net/AMR.734-737.2124",
language = "English",
isbn = "9783037857441",
series = "Advanced Materials Research",
pages = "2124--2127",
booktitle = "Resources and Sustainable Development",
note = "2013 2nd International Conference on Energy and Environmental Protection, ICEEP 2013 ; Conference date: 19-04-2013 Through 21-04-2013",
}