The calculation method of the electrostatic drive force of micro machined groscope comb

To calculate the electrostatic force in the micro machined gyroscope is a key problem in the mechanical characteristic of it. Base on the principle of electrostatic drive of the micro machined gyroscope, the paper introduces infinite plane model, edge-effect model and corner-effect model as the electrostatic field computation module of the micro comb. It deduces the formula of capacitance computation and electrostatic force of three models. By the numerical calculation and finite element calculation, it gets the capacitance and the electrostatic force of the gyroscope and the applicable circumstance of each model that the overlap length in variation. It suggests that the edge-effect and the corner-effect of comb should be fully considered when designing and computing the comb.