Technologies and applications of silicon-based micro-optical electromechanical systems: A brief review

Micro-optical electromechanical systems (MOEMS) combine the merits of micro-electromechanical systems (MEMS) and micro-optics to enable unique optical functions for a wide range of advanced applications. Using simple external electromechanical control methods, such as electrostatic, magnetic or thermal effects, Si-based MOEMS can achieve precise dynamic optical modulation. In this paper, we will briefly review the technologies and applications of Si-based MOEMS. Their basic working principles, advantages, general materials and micromachining fabrication technologies are introduced concisely, followed by research progress of advanced Si-based MOEMS devices, including micromirrors/micromirror arrays, micro-spectrometers, and optical/photonic switches. Owing to the unique advantages of Si-based MOEMS in spatial light modulation and high-speed signal processing, they have several promising applications in optical communications, digital light processing, and optical sensing. Finally, future research and development prospects of Si-based MOEMS are discussed.