Suspended graphene based nanomechanical acceleration transducers: a simulation study

Compared with conventional silicon-based accelerometers, graphene-based NEMS accelerometers offer distinct advantages such as reduced die size and high sensitivity due to its exceptional mechanical and electronic properties. However, the impacts of shapes of suspended graphene structures and the proof mass attached to the graphene on the mechanical performance of accelerometers have been insufficiently studied. In this work, we modeled a series of nanomechanical acceleration transducers based on different types of suspended graphene structures with attached SiO₂/Si proof masses. Finite element analysis was employed to study the mechanical properties of these suspended graphene-based acceleration transducers. Furthermore, the impact of geometry and size of the proof mass, built-in residual stress, and applied external force on the suspended graphene structures was deeply studied. These findings would provide a solid foundation for the rational design and performance optimization of next-generation high-performance graphene-based NEMS accelerometers.