Abstract
To improve the lifetime of AC plasma display panels (PDPs), the surface glow discharge characteristics of MgO films prepared by ion beam-assisted deposition have been investigated. With MgO films prepared by evaporation of MgO and simultaneous argon ion bombardment with energy of approximately 300 eV and oxygen introduction at a partial pressure of approximately 0.2 mTorr, the discharge voltage values are comparable with those of e-beam evaporated MgO films. Moreover, the sample prepared shows more sputter-resistant properties than samples prepared by the electron-beam method. It is believed that the ion beam-assisted method is appropriate to deposit MgO film for a protective layer for AC PDPs.
Original language | English |
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Pages (from-to) | 11-18 |
Number of pages | 8 |
Journal | Surface and Coatings Technology |
Volume | 162 |
Issue number | 1 |
DOIs | |
Publication status | Published - 1 Jan 2003 |
Externally published | Yes |
Keywords
- Ion beam-assisted deposition
- MgO films
- Plasma display panel