Surface-discharge characteristics of magnesium oxide thin films prepared by ion beam-assisted deposition

Zhi Nong Yu*, Jong Wook Seo, Soon Jae Yu, De Xiu Zheng, Jian Sun

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

22 Citations (Scopus)

Abstract

To improve the lifetime of AC plasma display panels (PDPs), the surface glow discharge characteristics of MgO films prepared by ion beam-assisted deposition have been investigated. With MgO films prepared by evaporation of MgO and simultaneous argon ion bombardment with energy of approximately 300 eV and oxygen introduction at a partial pressure of approximately 0.2 mTorr, the discharge voltage values are comparable with those of e-beam evaporated MgO films. Moreover, the sample prepared shows more sputter-resistant properties than samples prepared by the electron-beam method. It is believed that the ion beam-assisted method is appropriate to deposit MgO film for a protective layer for AC PDPs.

Original languageEnglish
Pages (from-to)11-18
Number of pages8
JournalSurface and Coatings Technology
Volume162
Issue number1
DOIs
Publication statusPublished - 1 Jan 2003
Externally publishedYes

Keywords

  • Ion beam-assisted deposition
  • MgO films
  • Plasma display panel

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