Superelastic and spring properties of Si3N4 microcoils

  • Chuanbao Cao*
  • , Hongli Du
  • , Yajie Xu
  • , Hesun Zhu
  • , Taihua Zhang
  • , Rong Yang
  • *Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

48 Citations (Scopus)

Abstract

A study was conducted to investigate the effects of monotonic and cyclic loading test on Si3N4 microcoils prepared by CVD process. The Instron microtester/photo mechanics tool systems was used to study the mechanical behavior of Si3N4 microcoil under tensile stress. The study observed that the tensile reversibility of the microcoils under cyclic loading can be used determine the superelasticity and spring properties of the microcoils. The whisker diameter of microcoils can be used to develop a relationship between the tensile strength and the diameter of coil whisker. The synthesis of microcoiled whiskers was carried out in a tune furnace using pure silicon powder and silica powder. The high performance microcoils can be used to prepare microscale device designs.

Original languageEnglish
Pages (from-to)1738-1743
Number of pages6
JournalAdvanced Materials
Volume20
Issue number9
DOIs
Publication statusPublished - 5 May 2008

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