Abstract
A study was conducted to investigate the effects of monotonic and cyclic loading test on Si3N4 microcoils prepared by CVD process. The Instron microtester/photo mechanics tool systems was used to study the mechanical behavior of Si3N4 microcoil under tensile stress. The study observed that the tensile reversibility of the microcoils under cyclic loading can be used determine the superelasticity and spring properties of the microcoils. The whisker diameter of microcoils can be used to develop a relationship between the tensile strength and the diameter of coil whisker. The synthesis of microcoiled whiskers was carried out in a tune furnace using pure silicon powder and silica powder. The high performance microcoils can be used to prepare microscale device designs.
| Original language | English |
|---|---|
| Pages (from-to) | 1738-1743 |
| Number of pages | 6 |
| Journal | Advanced Materials |
| Volume | 20 |
| Issue number | 9 |
| DOIs | |
| Publication status | Published - 5 May 2008 |