Study on the noise equivalent temperature difference and noise equivalent eradiation difference mathematical models for micro thermal imaging systems

To provide means for minute sized thermal analysis for LSI, biomedical engineering and scientific research, micro thermal imaging systems were designed. The mathematical models of noise equivalent temperature difference (NETD) and the noise equivalent eradiation difference (NEED) are established for micro thermal imaging systems. The difference between the micro pattern with the telescopic pattern is analyzed. Based on the ideal photon detector and ideal thermal detector, the relationship between NETD and NEED is studied. The derivation and simulation demonstrates that the relationship between them is nonlinear based on the temperature of background. Some suggestions are given to improve image quality.