Study on the image processing algorithms for optical readout based un-cooled MEMS IR imager systems

Li Quan Dong*, Xiao Hua Liu, Yue Jin Zhao, Ming Liu

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

MEMS thermal transducers offer a promising technological platform for un-cooled IR imaging. We report on the fabrication and performance of an optical readout based MEMS IR FPA based on the bimaterial microcantilever. For the IR images of objects obtained by these FPAs, processed by the fast Curvelet transform denoising and inpainting algorithm, the image quality is improved obviously. Great compute and analysis have been realized by using the discussed algorithm to the simulated data. The experimental results demonstrate, better RMSE and highest Peak Signal-to-Noise Ratio (PSNR) compared with traditional methods can be obtained. At last we discuss the factors that determine the ultimate performance of the FPA. And we indicated that one of the unique advantages of the present approach is the scalability to larger imaging arrays.

Original languageEnglish
Title of host publicationMEMS/MOEMS Technologies and Applications III
DOIs
Publication statusPublished - 2008
EventMEMS/MOEMS Technologies and Applications III - Beijing, China
Duration: 12 Nov 200714 Nov 2007

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
Volume6836
ISSN (Print)0277-786X

Conference

ConferenceMEMS/MOEMS Technologies and Applications III
Country/TerritoryChina
CityBeijing
Period12/11/0714/11/07

Keywords

  • Curvelet transform
  • MEMS
  • Microcantilever
  • Optical readout
  • Un-cooled IR

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