Structural and mechanical properties of titanium nitride films modulated by assisting ions

Lili Geng; Meichen Wu; Jiayi Guo; Junhao Wan; Fanya Jin; Zhaotan Jiang; Zhi Wang

doi:10.1016/j.nimb.2025.165756

Structural and mechanical properties of titanium nitride films modulated by assisting ions

Lili Geng, Meichen Wu, Jiayi Guo, Junhao Wan, Fanya Jin^*, Zhaotan Jiang, Zhi Wang

^*Corresponding author for this work

Research output: Contribution to journal › Article › peer-review

Abstract

Metal nitride superhard coating is an important way to protect metallic materials from wear and corrosion. In this work, series of TiN_x films were prepared by dual ion beam deposition, in which ion-sputtered particles were bombarded by low energy assisting ions on substrates. The crystal structure and mechanical properties of the films deposited by assisting ion energy E_a and current density J_a were studied. The films exhibit fcc-(111) optimal alignment. Assisting ion bombardment can further enhance the crystallinity of the films. Assisting ions can also promote the performances of the hardness, elastic modulus, critical load and wear resistance of the films to a significant extend. The results show that assisting ion beam is a promising technique to fabricate and modulate the properties of superhard nitride coatings.

Original language	English
Article number	165756
Journal	Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms
Volume	566
DOIs	https://doi.org/10.1016/j.nimb.2025.165756
Publication status	Published - Sept 2025
Externally published	Yes

Keywords

Ion beam
Mechanical property
Thin films
Titanium nitride

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10.1016/j.nimb.2025.165756

Cite this

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title = "Structural and mechanical properties of titanium nitride films modulated by assisting ions",

abstract = "Metal nitride superhard coating is an important way to protect metallic materials from wear and corrosion. In this work, series of TiNx films were prepared by dual ion beam deposition, in which ion-sputtered particles were bombarded by low energy assisting ions on substrates. The crystal structure and mechanical properties of the films deposited by assisting ion energy Ea and current density Ja were studied. The films exhibit fcc-(111) optimal alignment. Assisting ion bombardment can further enhance the crystallinity of the films. Assisting ions can also promote the performances of the hardness, elastic modulus, critical load and wear resistance of the films to a significant extend. The results show that assisting ion beam is a promising technique to fabricate and modulate the properties of superhard nitride coatings.",

keywords = "Ion beam, Mechanical property, Thin films, Titanium nitride",

author = "Lili Geng and Meichen Wu and Jiayi Guo and Junhao Wan and Fanya Jin and Zhaotan Jiang and Zhi Wang",

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year = "2025",

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doi = "10.1016/j.nimb.2025.165756",

language = "English",

volume = "566",

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TY - JOUR

T1 - Structural and mechanical properties of titanium nitride films modulated by assisting ions

AU - Geng, Lili

AU - Wu, Meichen

AU - Guo, Jiayi

AU - Wan, Junhao

AU - Jin, Fanya

AU - Jiang, Zhaotan

AU - Wang, Zhi

PY - 2025/9

Y1 - 2025/9

N2 - Metal nitride superhard coating is an important way to protect metallic materials from wear and corrosion. In this work, series of TiNx films were prepared by dual ion beam deposition, in which ion-sputtered particles were bombarded by low energy assisting ions on substrates. The crystal structure and mechanical properties of the films deposited by assisting ion energy Ea and current density Ja were studied. The films exhibit fcc-(111) optimal alignment. Assisting ion bombardment can further enhance the crystallinity of the films. Assisting ions can also promote the performances of the hardness, elastic modulus, critical load and wear resistance of the films to a significant extend. The results show that assisting ion beam is a promising technique to fabricate and modulate the properties of superhard nitride coatings.

AB - Metal nitride superhard coating is an important way to protect metallic materials from wear and corrosion. In this work, series of TiNx films were prepared by dual ion beam deposition, in which ion-sputtered particles were bombarded by low energy assisting ions on substrates. The crystal structure and mechanical properties of the films deposited by assisting ion energy Ea and current density Ja were studied. The films exhibit fcc-(111) optimal alignment. Assisting ion bombardment can further enhance the crystallinity of the films. Assisting ions can also promote the performances of the hardness, elastic modulus, critical load and wear resistance of the films to a significant extend. The results show that assisting ion beam is a promising technique to fabricate and modulate the properties of superhard nitride coatings.

KW - Ion beam

KW - Mechanical property

KW - Thin films

KW - Titanium nitride

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U2 - 10.1016/j.nimb.2025.165756

DO - 10.1016/j.nimb.2025.165756

M3 - Article

AN - SCOPUS:105007136779

SN - 0168-583X

VL - 566

JO - Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

JF - Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

M1 - 165756

ER -

Structural and mechanical properties of titanium nitride films modulated by assisting ions

Abstract

Keywords

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