Stability study of an electrothermally-actuated MEMS Mirror with Al/SiO2 bimorphs

Peng Wang; Ya Bing Liu; Donglin Wang; Huan Liu; Weiguo Liu; Hui Kai Xie

doi:10.3390/mi10100693

Stability study of an electrothermally-actuated MEMS Mirror with Al/SiO2 bimorphs

Peng Wang
, Ya Bing Liu
, Donglin Wang
, Huan Liu
, Weiguo Liu^*
, Hui Kai Xie

^*Corresponding author for this work

Research output: Contribution to journal › Article › peer-review

13 Citations (Scopus)

Abstract

Electrothermal actuation is one of the main actuation mechanisms and has been employed to make scanning microelectromechanical systems (MEMS) mirrors with large scan range, high fill factor, and low driving voltage, but there exist long-term drifting issues in electrothermal bimorph actuators whose causes are not well understood. In this paper, the stability of an Al/SiO₂ bimorph electrothermal MEMS mirror operated in both static and dynamic scan mode has been studied. Particularly, the angular drifts of the MEMS mirror plate were measured over 90 h at different temperatures in the range of 50-150 °C. The experiments show that the temporal drift of the mirror plate orientation largely depends on the temperature of the electrothermal bimorph actuators. Interestingly, it is found that the angular drift changes from falling to rising as the temperature increases. An optimal operating temperature between 75 °C to 100 °C for the MEMS mirror is identified. At this temperature, the MEMS mirror exhibited stable scanning with an angular drift of less than 0.0001°/h.

Original language	English
Article number	693
Journal	Micromachines
Volume	10
Issue number	10
DOIs	https://doi.org/10.3390/mi10100693
Publication status	Published - 1 Oct 2019
Externally published	Yes

Keywords

Electrothermal MEMS mirror
Electrothermal actuation
Electrothermal bimorph
Stability
Temporal drift

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10.3390/mi10100693

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@article{f34313e74c444f5a9d94b0525aa5d40a,

title = "Stability study of an electrothermally-actuated MEMS Mirror with Al/SiO2 bimorphs",

abstract = "Electrothermal actuation is one of the main actuation mechanisms and has been employed to make scanning microelectromechanical systems (MEMS) mirrors with large scan range, high fill factor, and low driving voltage, but there exist long-term drifting issues in electrothermal bimorph actuators whose causes are not well understood. In this paper, the stability of an Al/SiO2 bimorph electrothermal MEMS mirror operated in both static and dynamic scan mode has been studied. Particularly, the angular drifts of the MEMS mirror plate were measured over 90 h at different temperatures in the range of 50-150 °C. The experiments show that the temporal drift of the mirror plate orientation largely depends on the temperature of the electrothermal bimorph actuators. Interestingly, it is found that the angular drift changes from falling to rising as the temperature increases. An optimal operating temperature between 75 °C to 100 °C for the MEMS mirror is identified. At this temperature, the MEMS mirror exhibited stable scanning with an angular drift of less than 0.0001°/h.",

keywords = "Electrothermal MEMS mirror, Electrothermal actuation, Electrothermal bimorph, Stability, Temporal drift",

author = "Peng Wang and Liu, \{Ya Bing\} and Donglin Wang and Huan Liu and Weiguo Liu and Xie, \{Hui Kai\}",

note = "Publisher Copyright: {\textcopyright} 2019 by the authors.",

year = "2019",

month = oct,

day = "1",

doi = "10.3390/mi10100693",

language = "English",

volume = "10",

journal = "Micromachines",

issn = "2072-666X",

publisher = "Multidisciplinary Digital Publishing Institute (MDPI)",

number = "10",

}

TY - JOUR

T1 - Stability study of an electrothermally-actuated MEMS Mirror with Al/SiO2 bimorphs

AU - Wang, Peng

AU - Liu, Ya Bing

AU - Wang, Donglin

AU - Liu, Huan

AU - Liu, Weiguo

AU - Xie, Hui Kai

PY - 2019/10/1

Y1 - 2019/10/1

N2 - Electrothermal actuation is one of the main actuation mechanisms and has been employed to make scanning microelectromechanical systems (MEMS) mirrors with large scan range, high fill factor, and low driving voltage, but there exist long-term drifting issues in electrothermal bimorph actuators whose causes are not well understood. In this paper, the stability of an Al/SiO2 bimorph electrothermal MEMS mirror operated in both static and dynamic scan mode has been studied. Particularly, the angular drifts of the MEMS mirror plate were measured over 90 h at different temperatures in the range of 50-150 °C. The experiments show that the temporal drift of the mirror plate orientation largely depends on the temperature of the electrothermal bimorph actuators. Interestingly, it is found that the angular drift changes from falling to rising as the temperature increases. An optimal operating temperature between 75 °C to 100 °C for the MEMS mirror is identified. At this temperature, the MEMS mirror exhibited stable scanning with an angular drift of less than 0.0001°/h.

AB - Electrothermal actuation is one of the main actuation mechanisms and has been employed to make scanning microelectromechanical systems (MEMS) mirrors with large scan range, high fill factor, and low driving voltage, but there exist long-term drifting issues in electrothermal bimorph actuators whose causes are not well understood. In this paper, the stability of an Al/SiO2 bimorph electrothermal MEMS mirror operated in both static and dynamic scan mode has been studied. Particularly, the angular drifts of the MEMS mirror plate were measured over 90 h at different temperatures in the range of 50-150 °C. The experiments show that the temporal drift of the mirror plate orientation largely depends on the temperature of the electrothermal bimorph actuators. Interestingly, it is found that the angular drift changes from falling to rising as the temperature increases. An optimal operating temperature between 75 °C to 100 °C for the MEMS mirror is identified. At this temperature, the MEMS mirror exhibited stable scanning with an angular drift of less than 0.0001°/h.

KW - Electrothermal MEMS mirror

KW - Electrothermal actuation

KW - Electrothermal bimorph

KW - Stability

KW - Temporal drift

UR - https://www.scopus.com/pages/publications/85074522109

U2 - 10.3390/mi10100693

DO - 10.3390/mi10100693

M3 - Article

AN - SCOPUS:85074522109

SN - 2072-666X

VL - 10

JO - Micromachines

JF - Micromachines

IS - 10

M1 - 693

ER -

Stability study of an electrothermally-actuated MEMS Mirror with Al/SiO2 bimorphs

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Keywords

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