@inproceedings{21ca2876af1644bdab56c9f68ca970d2,
title = "Split nanofocusing spots beyond diffraction limit via a new near-field plasmonic structure",
abstract = "The focusing spot beyond diffraction limit is critical to plasmonic direct-writing lithography. To improve the speed and precision of plasmonic direct-writing lithography, we design a new periodically repeated circular hole/elliptical ring plasmonic structure named as split-focusing structure used for producing two focusing spots under the incidence of linearly polarized plane wave at 633nm wavelength. It consists of SiO2 infstrate and coated silver film with holes and slits of different shapes. By designing appropriate structure parameters to excite localized surface plasmon resonance, two split infwavelength spots are produced on the focal plane. Finite-difference time-domain (FDTD) method is used for numerical simulation. The simulation result indicates that the focal length of structure is 36nm and the full width at half maximum (FWHM) of single spot is 50nm. Both split spots can be used for direct writing so the speed of photoetching will be raised. The dual spots are both in circular shape, which is beneficial to improve the pattern precision. The influence of structure parameters on focusing performance is also analyzed to guide the practical fabrication of structure. The split-focusing structure designed in this paper also owns application values in data storage and non-contact sensing.",
keywords = "Localized surface plasmon, Nanolithography, Plasmonic structure",
author = "Zhe Guo and Yanqiu Li and Yanjun Chen",
note = "Publisher Copyright: {\textcopyright} 2018 SPIE. Downloading of the abstract is permitted for personal use only.; International Symposium on Optoelectronic Technology and Application 2018: Micro-Optics and MOEMS, OTA 2018 ; Conference date: 22-05-2018 Through 24-05-2018",
year = "2018",
doi = "10.1117/12.2505457",
language = "English",
series = "Proceedings of SPIE - The International Society for Optical Engineering",
publisher = "SPIE",
editor = "Huikai Xie and Yuelin Wang",
booktitle = "Micro-Optics and MOEMS",
address = "United States",
}