TY - GEN
T1 - Simultaneous Sensing of Refractive Index and Temperature Using a Symmetry-breaking Silicon Metasurface with Multiple Fano Peaks
AU - Zhao, Luo
AU - Wang, Junyi
AU - Li, Haiyang
AU - Zhang, Cheng
AU - Kang, Guoguo
N1 - Publisher Copyright:
© 2021 IEEE.
PY - 2021/4/25
Y1 - 2021/4/25
N2 - In this paper, an asymmetric all-dielectric metasurface is used to measure the temperature and refractive index (RI) simultaneously. We use FDTD Solutions to obtain reflection spectrum, and use the two Fano peaks to realize two parameter sensing. The Fano resonance of narrow line width increases the figure of merit (FoM, ratio of sensitivity to full width at half maximum) by two orders of magnitude compared to previous proposed dual parameter sensors. Simulation reveals the sensor possessing RI sensitivities of 444.52 nm/RIU and 100.06 nm/RIU, FoMs of 1778.08 and 227.41, temperature sensitivities of 34.9 pm/°C and 83.8 pm/°C. The device has the advantages of simple structure, easy to manufacture, small volume and low loss. It has a good prospect in the application of biological and chemical sensing, especially in the measurement of substance concentration.
AB - In this paper, an asymmetric all-dielectric metasurface is used to measure the temperature and refractive index (RI) simultaneously. We use FDTD Solutions to obtain reflection spectrum, and use the two Fano peaks to realize two parameter sensing. The Fano resonance of narrow line width increases the figure of merit (FoM, ratio of sensitivity to full width at half maximum) by two orders of magnitude compared to previous proposed dual parameter sensors. Simulation reveals the sensor possessing RI sensitivities of 444.52 nm/RIU and 100.06 nm/RIU, FoMs of 1778.08 and 227.41, temperature sensitivities of 34.9 pm/°C and 83.8 pm/°C. The device has the advantages of simple structure, easy to manufacture, small volume and low loss. It has a good prospect in the application of biological and chemical sensing, especially in the measurement of substance concentration.
KW - Fano resonance
KW - Metasurface
KW - Refractive index sensing
KW - Simultaneous measurement
KW - Temperature sensing
UR - https://www.scopus.com/pages/publications/85113317310
U2 - 10.1109/NEMS51815.2021.9451319
DO - 10.1109/NEMS51815.2021.9451319
M3 - Conference contribution
AN - SCOPUS:85113317310
T3 - Proceedings of the 16th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2021
SP - 1441
EP - 1446
BT - Proceedings of the 16th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2021
PB - Institute of Electrical and Electronics Engineers Inc.
T2 - 16th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2021
Y2 - 25 April 2021 through 29 April 2021
ER -