Simulations and Experiments on the Fabrication of Silicon Tip

Mingliang Wang; Daoheng Sun; Yanhua Wang

doi:10.1117/12.524647

Simulations and Experiments on the Fabrication of Silicon Tip

Mingliang Wang, Daoheng Sun^*, Yanhua Wang

^*Corresponding author for this work

Xiamen University

Research output: Contribution to journal › Conference article › peer-review

Abstract

Simulations and experiments on three kinds of Si tip fabrication techniques had been done, which are Anisotropic Dry Etching (ADE), Anisotropic Wet Etching (AWE) and AWE combining with bonding. The simulation results showed that the parameters applied in the ADE and AWE should be controlled much more precisely than AWE combining with bonding to get expected tips. The experiments prove that the parameters of fabricating silicon tip by ADE and AWE have little tolerance. The conclusions on AWE combining with bonding drew from simulations are verified in the detail experiments. From the simulations and experiments, excellent reliability and controllability are witnessed in AWE combining with bonding and a tip with top diameter within 23.44nm had been achieved.

Original language	English
Pages (from-to)	35-41
Number of pages	7
Journal	Proceedings of SPIE - The International Society for Optical Engineering
Volume	5342
DOIs	https://doi.org/10.1117/12.524647
Publication status	Published - 2004
Externally published	Yes
Event	Micromachining and Microfabrication Process Technology IX - San Jose, CA., United States Duration: 27 Jan 2004 → 29 Jan 2004

Keywords

Anisotropic dry etching
Anisotropic wet etching
Bonding
Silicon tip

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title = "Simulations and Experiments on the Fabrication of Silicon Tip",

abstract = "Simulations and experiments on three kinds of Si tip fabrication techniques had been done, which are Anisotropic Dry Etching (ADE), Anisotropic Wet Etching (AWE) and AWE combining with bonding. The simulation results showed that the parameters applied in the ADE and AWE should be controlled much more precisely than AWE combining with bonding to get expected tips. The experiments prove that the parameters of fabricating silicon tip by ADE and AWE have little tolerance. The conclusions on AWE combining with bonding drew from simulations are verified in the detail experiments. From the simulations and experiments, excellent reliability and controllability are witnessed in AWE combining with bonding and a tip with top diameter within 23.44nm had been achieved.",

keywords = "Anisotropic dry etching, Anisotropic wet etching, Bonding, Silicon tip",

author = "Mingliang Wang and Daoheng Sun and Yanhua Wang",

year = "2004",

doi = "10.1117/12.524647",

language = "English",

volume = "5342",

pages = "35--41",

journal = "Proceedings of SPIE - The International Society for Optical Engineering",

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TY - JOUR

T1 - Simulations and Experiments on the Fabrication of Silicon Tip

AU - Wang, Mingliang

AU - Sun, Daoheng

AU - Wang, Yanhua

PY - 2004

Y1 - 2004

N2 - Simulations and experiments on three kinds of Si tip fabrication techniques had been done, which are Anisotropic Dry Etching (ADE), Anisotropic Wet Etching (AWE) and AWE combining with bonding. The simulation results showed that the parameters applied in the ADE and AWE should be controlled much more precisely than AWE combining with bonding to get expected tips. The experiments prove that the parameters of fabricating silicon tip by ADE and AWE have little tolerance. The conclusions on AWE combining with bonding drew from simulations are verified in the detail experiments. From the simulations and experiments, excellent reliability and controllability are witnessed in AWE combining with bonding and a tip with top diameter within 23.44nm had been achieved.

AB - Simulations and experiments on three kinds of Si tip fabrication techniques had been done, which are Anisotropic Dry Etching (ADE), Anisotropic Wet Etching (AWE) and AWE combining with bonding. The simulation results showed that the parameters applied in the ADE and AWE should be controlled much more precisely than AWE combining with bonding to get expected tips. The experiments prove that the parameters of fabricating silicon tip by ADE and AWE have little tolerance. The conclusions on AWE combining with bonding drew from simulations are verified in the detail experiments. From the simulations and experiments, excellent reliability and controllability are witnessed in AWE combining with bonding and a tip with top diameter within 23.44nm had been achieved.

KW - Anisotropic dry etching

KW - Anisotropic wet etching

KW - Bonding

KW - Silicon tip

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VL - 5342

SP - 35

EP - 41

JO - Proceedings of SPIE - The International Society for Optical Engineering

JF - Proceedings of SPIE - The International Society for Optical Engineering

T2 - Micromachining and Microfabrication Process Technology IX

Y2 - 27 January 2004 through 29 January 2004

ER -

Simulations and Experiments on the Fabrication of Silicon Tip

Abstract

Keywords

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