TY - GEN
T1 - Simulation of Surface Acoustic Wave Torque Sensors using Coupling of Mode Analysis
AU - Jiang, Chao
AU - Xie, Huikai
AU - Cao, Xiaoli
AU - Tang, Lianggui
AU - Deng, Yibin
N1 - Publisher Copyright:
©2024 IEEE.
PY - 2024
Y1 - 2024
N2 - In this work, a simulation scheme using coupling-of-mode (COM) analysis for surface acoustic wave (SAW) torque sensors is presented. To extract the COM parameters, the finite element analysis (FEA) is employed. A static study of a shaft with an applied torque is carried out so that the stress and strain field distributions on the piezoelectric substrate can be examined. Then, the simulations on a unit periodic structure of a SAW device with and without applied torques are conducted. Finally, the frequency responses of a SAW torque sensor using a P-matrix cascading technique with the COM parameters are simulated, where a good linearity between the applied torques and frequency responses is presented. The proposed method not only provides the frequency response of a SAW torque sensor, but also it allows its bias sensitivity to be evaluated.
AB - In this work, a simulation scheme using coupling-of-mode (COM) analysis for surface acoustic wave (SAW) torque sensors is presented. To extract the COM parameters, the finite element analysis (FEA) is employed. A static study of a shaft with an applied torque is carried out so that the stress and strain field distributions on the piezoelectric substrate can be examined. Then, the simulations on a unit periodic structure of a SAW device with and without applied torques are conducted. Finally, the frequency responses of a SAW torque sensor using a P-matrix cascading technique with the COM parameters are simulated, where a good linearity between the applied torques and frequency responses is presented. The proposed method not only provides the frequency response of a SAW torque sensor, but also it allows its bias sensitivity to be evaluated.
KW - coupling of mode (COM) analysis
KW - finite element analysis (FEA)
KW - surface acoustic wave (SAW)
KW - torque sensors
UR - http://www.scopus.com/inward/record.url?scp=85195661604&partnerID=8YFLogxK
U2 - 10.1109/IC-MAM60575.2024.10539020
DO - 10.1109/IC-MAM60575.2024.10539020
M3 - Conference contribution
AN - SCOPUS:85195661604
T3 - IEEE MTT-S International Conference on Microwave Acoustics and Mechanics, IC-MAM 2024
SP - 89
EP - 92
BT - IEEE MTT-S International Conference on Microwave Acoustics and Mechanics, IC-MAM 2024
PB - Institute of Electrical and Electronics Engineers Inc.
T2 - 2nd IEEE MTT-S International Conference on Microwave Acoustics and Mechanics, IC-MAM 2024
Y2 - 13 May 2024 through 15 May 2024
ER -