@inproceedings{23e5615a056f438a857127ac2e56d33a,
title = "Simulation analysis on the design of the PZT stacked array deformable mirror",
abstract = "The influence function of the actuators can be expressed as a Gaussian function. The exponent of the Gaussian function influences the reconstruction precision of the deformable mirror (DM). A finite element model of the PZT stacked array DM with 55 actuators was created, and each actuator was separately controlled. The influence of the structural parameters of the DM on the Gaussian index and coupling coefficient was investigated. Based on the simulation results, the design of the DM was optimized. In addition, using simulation, the fatigue life and working bandwidth of the new model were studied. Specific aberration surfaces were reconstructed. The results showed that the optimized DM had a smaller reconstruction error compared with the pre-optimized model. This study can be used as a reference for the design of DMs.",
keywords = "Coupling coefficient, Deformable mirror, Finite element analysis, Influence function, Optimization",
author = "Xuemin Cheng and Jindong Wang and Yao Hu and Qun Hao",
note = "Publisher Copyright: {\textcopyright} COPYRIGHT SPIE. Downloading of the abstract is permitted for personal use only.; 10th International Symposium on Precision Mechanical Measurements ; Conference date: 15-10-2021 Through 17-10-2021",
year = "2021",
doi = "10.1117/12.2612138",
language = "English",
series = "Proceedings of SPIE - The International Society for Optical Engineering",
publisher = "SPIE",
editor = "Haojie Xia and Yang, {Lian X.} and Liandong Yu",
booktitle = "Tenth International Symposium on Precision Mechanical Measurements",
address = "United States",
}