Silicon-based on-chip electrically tunable sidewall Bragg grating Fabry-Perot filter

We report the design, fabrication, and testing of a siliconbased on-chip electrically tunable sidewall Bragg grating Fabry-Perot filter. Spectral measurement shows that the filter has a narrow notch in reflection of approximately 46 pm, a Q-factor of 33,500, and an extinction ratio of 16.4 dB. DC measurement shows that the average central wavelength shift rates with forward and reverse bias are 1.15 nmV and 4.2 pmV, respectively. Due to strong light confinement in the Fabry-Perot cavity, the electrooptic frequency response shows that the filter has a 3-dB modulation bandwidth of 5.6 GHz. The performance of using the filter to perform modulation of a 3.5 Gbs 27 1 nonreturn-to-zero pseudorandom binary sequence is evaluated.