Short pulse laser micro/nano manufacturing: Fundamentals and applications

Lan Jiang; Xin Li; Xi Peng Zhang; Qiang Hua Chen; Hai Lung Tsai; Yong Feng Lu

doi:10.1504/IJNM.2011.040719

Short pulse laser micro/nano manufacturing: Fundamentals and applications

Lan Jiang^*
, Xin Li
, Xi Peng Zhang
, Qiang Hua Chen
, Hai Lung Tsai
, Yong Feng Lu

^*Corresponding author for this work

School of Mechanical Engineering

Beijing Institute of Technology
Missouri University of Science and Technology
University of Nebraska-Lincoln

Research output: Contribution to journal › Article › peer-review

1 Citation (Scopus)

Abstract

Lasers, especially femtosecond lasers, open wide-range and exciting new possibilities in micro/nanomanufacturing of metals, polymers, semiconductors, ultrahard materials, transparent materials, and tissues. This paper reviews the fundamentals, applications and challenges of laser micro/nano manufacturing, including ultrashort laser materials interaction, laser direct-writing manufacturing, laser interference manufacturing, laser near-field manufacturing, laser manufacturing of nanoparticles and nanotubes, and laser assisted diamond crystals growth.

Original language	English
Pages (from-to)	126-142
Number of pages	17
Journal	International Journal of Nanomanufacturing
Volume	7
Issue number	2
DOIs	https://doi.org/10.1504/IJNM.2011.040719
Publication status	Published - Jun 2011

Keywords

Laser direct-writing manufacturing
Laser interference manufacturing
Laser materials interaction
Laser near-field manufacturing

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title = "Short pulse laser micro/nano manufacturing: Fundamentals and applications",

abstract = "Lasers, especially femtosecond lasers, open wide-range and exciting new possibilities in micro/nanomanufacturing of metals, polymers, semiconductors, ultrahard materials, transparent materials, and tissues. This paper reviews the fundamentals, applications and challenges of laser micro/nano manufacturing, including ultrashort laser materials interaction, laser direct-writing manufacturing, laser interference manufacturing, laser near-field manufacturing, laser manufacturing of nanoparticles and nanotubes, and laser assisted diamond crystals growth.",

keywords = "Laser direct-writing manufacturing, Laser interference manufacturing, Laser materials interaction, Laser near-field manufacturing",

author = "Lan Jiang and Xin Li and Zhang, \{Xi Peng\} and Chen, \{Qiang Hua\} and Tsai, \{Hai Lung\} and Lu, \{Yong Feng\}",

year = "2011",

month = jun,

doi = "10.1504/IJNM.2011.040719",

language = "English",

volume = "7",

pages = "126--142",

journal = "International Journal of Nanomanufacturing",

issn = "1746-9392",

publisher = "Inderscience Enterprises Ltd",

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T1 - Short pulse laser micro/nano manufacturing

T2 - Fundamentals and applications

AU - Jiang, Lan

AU - Li, Xin

AU - Zhang, Xi Peng

AU - Chen, Qiang Hua

AU - Tsai, Hai Lung

AU - Lu, Yong Feng

PY - 2011/6

Y1 - 2011/6

N2 - Lasers, especially femtosecond lasers, open wide-range and exciting new possibilities in micro/nanomanufacturing of metals, polymers, semiconductors, ultrahard materials, transparent materials, and tissues. This paper reviews the fundamentals, applications and challenges of laser micro/nano manufacturing, including ultrashort laser materials interaction, laser direct-writing manufacturing, laser interference manufacturing, laser near-field manufacturing, laser manufacturing of nanoparticles and nanotubes, and laser assisted diamond crystals growth.

AB - Lasers, especially femtosecond lasers, open wide-range and exciting new possibilities in micro/nanomanufacturing of metals, polymers, semiconductors, ultrahard materials, transparent materials, and tissues. This paper reviews the fundamentals, applications and challenges of laser micro/nano manufacturing, including ultrashort laser materials interaction, laser direct-writing manufacturing, laser interference manufacturing, laser near-field manufacturing, laser manufacturing of nanoparticles and nanotubes, and laser assisted diamond crystals growth.

KW - Laser direct-writing manufacturing

KW - Laser interference manufacturing

KW - Laser materials interaction

KW - Laser near-field manufacturing

UR - https://www.scopus.com/pages/publications/79959327399

U2 - 10.1504/IJNM.2011.040719

DO - 10.1504/IJNM.2011.040719

M3 - Article

AN - SCOPUS:79959327399

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VL - 7

SP - 126

EP - 142

JO - International Journal of Nanomanufacturing

JF - International Journal of Nanomanufacturing

IS - 2

ER -

Short pulse laser micro/nano manufacturing: Fundamentals and applications

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Keywords

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