Scalable Fabrication of Stable High Efficiency Perovskite Solar Cells and Modules Utilizing Room Temperature Sputtered SnO₂ Electron Transport Layer

Stability and scalability have become the two main challenges for perovskite solar cells (PSCs) with the research focus in the field advancing toward commercialization. One of the prerequisites to solve these challenges is to develop a cost-effective, uniform, and high quality electron transport layer that is compatible with stable PSCs. Sputtering deposition is widely employed for large area deposition of high quality thin films in the industry. Here the composition, structure, and electronic properties of room temperature sputtered SnO₂ are systematically studied. Ar and O₂ are used as the sputtering and reactive gas, respectively, and it is found that a highly oxidizing environment is essential for the formation of high quality SnO₂ films. With the optimized structure, SnO₂ films with high quality have been prepared. It is demonstrated that PSCs based on the sputtered SnO₂ electron transport layer show an efficiency up to 20.2% (stabilized power output of 19.8%) and a T₈₀ operational lifetime of 625 h. Furthermore, the uniform and thin sputtered SnO₂ film with high conductivity is promising for large area solar modules, which show efficiencies over 12% with an aperture area of 22.8 cm² fabricated on 5 × 5 cm² substrates (geometry fill factor = 91%), and a T₈₀ operational lifetime of 515 h.