Resonant Transducers Consisting of Graphene Ribbons with Attached Proof Masses for NEMS Sensors

Xuge Fan; Daniel Moreno-Garcia; Jie Ding; Kristinn B. Gylfason; Luis Guillermo Villanueva; Frank Niklaus

doi:10.1021/acsanm.3c03642

Resonant Transducers Consisting of Graphene Ribbons with Attached Proof Masses for NEMS Sensors

Xuge Fan^*, Daniel Moreno-Garcia, Jie Ding, Kristinn B. Gylfason, Luis Guillermo Villanueva^*, Frank Niklaus^*

^*Corresponding author for this work

Research output: Contribution to journal › Article › peer-review

11 Citations (Scopus)

Abstract

The unique mechanical and electrical properties of graphene make it an exciting material for nanoelectromechanical systems (NEMS). NEMS resonators with graphene springs facilitate studies of graphene’s fundamental material characteristics and thus enable innovative device concepts for applications such as sensors. Here, we demonstrate resonant transducers with ribbon-springs made of double-layer graphene and proof masses made of silicon and study their nonlinear mechanics at resonance both in air and in vacuum by laser Doppler vibrometry. Surprisingly, we observe spring-stiffening and spring-softening at resonance, depending on the graphene spring designs. The measured quality factors of the resonators in a vacuum are between 150 and 350. These results pave the way for a class of ultraminiaturized nanomechanical sensors such as accelerometers by contributing to the understanding of the dynamics of transducers based on graphene ribbons with an attached proof mass.

Original language	English
Pages (from-to)	102-109
Number of pages	8
Journal	ACS Applied Nano Materials
Volume	7
Issue number	1
DOIs	https://doi.org/10.1021/acsanm.3c03642
Publication status	Published - 12 Jan 2024

Keywords

NEMS
graphene
nonlinear resonance
resonators
suspended graphene

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10.1021/acsanm.3c03642

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title = "Resonant Transducers Consisting of Graphene Ribbons with Attached Proof Masses for NEMS Sensors",

abstract = "The unique mechanical and electrical properties of graphene make it an exciting material for nanoelectromechanical systems (NEMS). NEMS resonators with graphene springs facilitate studies of graphene{\textquoteright}s fundamental material characteristics and thus enable innovative device concepts for applications such as sensors. Here, we demonstrate resonant transducers with ribbon-springs made of double-layer graphene and proof masses made of silicon and study their nonlinear mechanics at resonance both in air and in vacuum by laser Doppler vibrometry. Surprisingly, we observe spring-stiffening and spring-softening at resonance, depending on the graphene spring designs. The measured quality factors of the resonators in a vacuum are between 150 and 350. These results pave the way for a class of ultraminiaturized nanomechanical sensors such as accelerometers by contributing to the understanding of the dynamics of transducers based on graphene ribbons with an attached proof mass.",

keywords = "NEMS, graphene, nonlinear resonance, resonators, suspended graphene",

author = "Xuge Fan and Daniel Moreno-Garcia and Jie Ding and Gylfason, \{Kristinn B.\} and Villanueva, \{Luis Guillermo\} and Frank Niklaus",

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AU - Fan, Xuge

AU - Moreno-Garcia, Daniel

AU - Ding, Jie

AU - Gylfason, Kristinn B.

AU - Villanueva, Luis Guillermo

AU - Niklaus, Frank

PY - 2024/1/12

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AB - The unique mechanical and electrical properties of graphene make it an exciting material for nanoelectromechanical systems (NEMS). NEMS resonators with graphene springs facilitate studies of graphene’s fundamental material characteristics and thus enable innovative device concepts for applications such as sensors. Here, we demonstrate resonant transducers with ribbon-springs made of double-layer graphene and proof masses made of silicon and study their nonlinear mechanics at resonance both in air and in vacuum by laser Doppler vibrometry. Surprisingly, we observe spring-stiffening and spring-softening at resonance, depending on the graphene spring designs. The measured quality factors of the resonators in a vacuum are between 150 and 350. These results pave the way for a class of ultraminiaturized nanomechanical sensors such as accelerometers by contributing to the understanding of the dynamics of transducers based on graphene ribbons with an attached proof mass.

KW - NEMS

KW - graphene

KW - nonlinear resonance

KW - resonators

KW - suspended graphene

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Resonant Transducers Consisting of Graphene Ribbons with Attached Proof Masses for NEMS Sensors

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Keywords

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