Resonance frequency tracking and measuring system for micro-electromechanical cantilever array sensors

Ju Liao; Jingjing Wang; Nannan Li; Yinfang Zhu; Jinying Zhang; Jinling Yang; Fuhua Yang

doi:10.1007/s00542-016-2930-3

Resonance frequency tracking and measuring system for micro-electromechanical cantilever array sensors

Ju Liao
, Jingjing Wang
, Nannan Li
, Yinfang Zhu
, Jinying Zhang
, Jinling Yang^*
, Fuhua Yang

^*Corresponding author for this work

Research output: Contribution to journal › Article › peer-review

6 Citations (Scopus)

Abstract

This paper presents a resonance frequency tracking and measuring system for MEMS cantilever array sensors. A cell constitutes five micro-cantilevers driven by a piezoactuator, and the resonance signal of each micro-cantilever is read out by a Wheatstone bridge. An analog resonance circuit is developed to track all resonance frequencies. Meanwhile, a digital circuit base on Microcontroller Unit is utilized to measure the resonance frequency and processes the data. The developed system has a frequency capture range from 190 to 310 kHz. The measurement accuracy of the frequency measuring circuit is 0.3 Hz. Moreover, the frequency stability of micro-cantilever in this system can achieve 4 Hz. This system provides a promising approach to apply micro-cantilever array sensors in a portable instrument.

Original language	English
Pages (from-to)	2013-2021
Number of pages	9
Journal	Microsystem Technologies
Volume	23
Issue number	6
DOIs	https://doi.org/10.1007/s00542-016-2930-3
Publication status	Published - 1 Jun 2017
Externally published	Yes

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title = "Resonance frequency tracking and measuring system for micro-electromechanical cantilever array sensors",

abstract = "This paper presents a resonance frequency tracking and measuring system for MEMS cantilever array sensors. A cell constitutes five micro-cantilevers driven by a piezoactuator, and the resonance signal of each micro-cantilever is read out by a Wheatstone bridge. An analog resonance circuit is developed to track all resonance frequencies. Meanwhile, a digital circuit base on Microcontroller Unit is utilized to measure the resonance frequency and processes the data. The developed system has a frequency capture range from 190 to 310 kHz. The measurement accuracy of the frequency measuring circuit is 0.3 Hz. Moreover, the frequency stability of micro-cantilever in this system can achieve 4 Hz. This system provides a promising approach to apply micro-cantilever array sensors in a portable instrument.",

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T1 - Resonance frequency tracking and measuring system for micro-electromechanical cantilever array sensors

AU - Liao, Ju

AU - Wang, Jingjing

AU - Li, Nannan

AU - Zhu, Yinfang

AU - Zhang, Jinying

AU - Yang, Jinling

AU - Yang, Fuhua

PY - 2017/6/1

Y1 - 2017/6/1

N2 - This paper presents a resonance frequency tracking and measuring system for MEMS cantilever array sensors. A cell constitutes five micro-cantilevers driven by a piezoactuator, and the resonance signal of each micro-cantilever is read out by a Wheatstone bridge. An analog resonance circuit is developed to track all resonance frequencies. Meanwhile, a digital circuit base on Microcontroller Unit is utilized to measure the resonance frequency and processes the data. The developed system has a frequency capture range from 190 to 310 kHz. The measurement accuracy of the frequency measuring circuit is 0.3 Hz. Moreover, the frequency stability of micro-cantilever in this system can achieve 4 Hz. This system provides a promising approach to apply micro-cantilever array sensors in a portable instrument.

AB - This paper presents a resonance frequency tracking and measuring system for MEMS cantilever array sensors. A cell constitutes five micro-cantilevers driven by a piezoactuator, and the resonance signal of each micro-cantilever is read out by a Wheatstone bridge. An analog resonance circuit is developed to track all resonance frequencies. Meanwhile, a digital circuit base on Microcontroller Unit is utilized to measure the resonance frequency and processes the data. The developed system has a frequency capture range from 190 to 310 kHz. The measurement accuracy of the frequency measuring circuit is 0.3 Hz. Moreover, the frequency stability of micro-cantilever in this system can achieve 4 Hz. This system provides a promising approach to apply micro-cantilever array sensors in a portable instrument.

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DO - 10.1007/s00542-016-2930-3

M3 - Article

AN - SCOPUS:84963644340

SN - 0946-7076

VL - 23

SP - 2013

EP - 2021

JO - Microsystem Technologies

JF - Microsystem Technologies

IS - 6

ER -

Resonance frequency tracking and measuring system for micro-electromechanical cantilever array sensors

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