Research on zero bias characteristic of MEMS accelerometer in FBW

Lun Chao Zhong, Jian Zhong Wang*, Jia Dong Shi

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

Zero bias is an important performance index of MEMS accelerometerscope. Based on the large amount of given accelerometer experiments, we study zero bias of random error properties, temperature characteristic, large overload environment variation, and then calculate MEMS accelerometer bias, bias stability, zero bias repeatability. Through least-square method,we fit temperature scale factor and temperature bias of MEMS accelerometer. The experimental results show that the compensation method has the advantages of simple operation, effectively compensation for measuring error of MEMS accelerometer which is induced by temperature, and has strong engineering using value.

Original languageEnglish
Title of host publicationMicro-Nano Technology XV
PublisherTrans Tech Publications Ltd.
Pages1046-1052
Number of pages7
ISBN (Print)9783038350712
DOIs
Publication statusPublished - 2014
Event15th Annual Conference and 4th International Conference of the Chinese Society of Micro-Nano Technology, CSMNT 2013 - Tianjin, China
Duration: 3 Nov 20136 Nov 2013

Publication series

NameKey Engineering Materials
Volume609-610
ISSN (Print)1013-9826
ISSN (Electronic)1662-9795

Conference

Conference15th Annual Conference and 4th International Conference of the Chinese Society of Micro-Nano Technology, CSMNT 2013
Country/TerritoryChina
CityTianjin
Period3/11/136/11/13

Keywords

  • Least square method
  • MEMS accelerometer
  • Mechanical zero
  • Zero bias

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