Research on surface formation mechanism in elliptical ultrasonic assisted grinding (EUAG) of monocrystal sapphire using structure function fractal method

Qiuyan Wang; Zhiqiang Liang; Xibin Wang; Wenxiang Zhao; Yongbo Wu; Li Jiao; Tianfeng Zhou

doi:10.1115/MSEC20159300

Research on surface formation mechanism in elliptical ultrasonic assisted grinding (EUAG) of monocrystal sapphire using structure function fractal method

Qiuyan Wang
, Zhiqiang Liang
, Xibin Wang
, Wenxiang Zhao
, Yongbo Wu
, Li Jiao
, Tianfeng Zhou

School of Mechanical Engineering

Beijing Institute of Technology
Akita Prefectural University

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

1 Citation (Scopus)

Abstract

This study investigates surface formation characteristics in elliptical ultrasonic assisted grinding (EUAG) of monocrystal sapphire using structure function fractal method. During the EUAG process, the workpiece is imposed to ultrasonically vibrate in two directions, i.e., vertical and parallel to work-surface, by using an elliptical ultrasonic vibrator. To clarify the work-surface formation characteristics in EUAG of sapphire material, grinding experiments are carried out involving sapphire substrate. In experiments, work-surface roughness is measured, and the ground work-surface morphology is examined by scanning electron microscope (SEM) and its fractal dimension was calculated by structure function method. The fractal dimension of ground surface in EUAG is bigger than that in conventional grinding (CG), meaning that the ground surface in EUAG is more exquisite and better than that in CG. Therefore, the fractal analysis method has the potential to reveal the ground surface characteristics in EUAG of monocrystal sapphire.

Original language	English
Title of host publication	Processing
Publisher	American Society of Mechanical Engineers
ISBN (Electronic)	9780791856826
DOIs	https://doi.org/10.1115/MSEC20159300
Publication status	Published - 2015
Event	ASME 2015 International Manufacturing Science and Engineering Conference, MSEC 2015 - Charlotte, United States Duration: 8 Jun 2015 → 12 Jun 2015

Publication series

Name	ASME 2015 International Manufacturing Science and Engineering Conference, MSEC 2015
Volume	1

Conference

Conference	ASME 2015 International Manufacturing Science and Engineering Conference, MSEC 2015
Country/Territory	United States
City	Charlotte
Period	8/06/15 → 12/06/15

Keywords

Elliptical ultrasonic assisted grinding (EUAG)
Fractal analysis
Grinding
Sapphire
Surface formation characteristics

Access to Document

10.1115/MSEC20159300

Cite this

Wang, Q., Liang, Z., Wang, X., Zhao, W., Wu, Y., Jiao, L., & Zhou, T. (2015). Research on surface formation mechanism in elliptical ultrasonic assisted grinding (EUAG) of monocrystal sapphire using structure function fractal method. In Processing (ASME 2015 International Manufacturing Science and Engineering Conference, MSEC 2015; Vol. 1). American Society of Mechanical Engineers. https://doi.org/10.1115/MSEC20159300

@inproceedings{80317e50bac2442fbd773924feead896,

title = "Research on surface formation mechanism in elliptical ultrasonic assisted grinding (EUAG) of monocrystal sapphire using structure function fractal method",

abstract = "This study investigates surface formation characteristics in elliptical ultrasonic assisted grinding (EUAG) of monocrystal sapphire using structure function fractal method. During the EUAG process, the workpiece is imposed to ultrasonically vibrate in two directions, i.e., vertical and parallel to work-surface, by using an elliptical ultrasonic vibrator. To clarify the work-surface formation characteristics in EUAG of sapphire material, grinding experiments are carried out involving sapphire substrate. In experiments, work-surface roughness is measured, and the ground work-surface morphology is examined by scanning electron microscope (SEM) and its fractal dimension was calculated by structure function method. The fractal dimension of ground surface in EUAG is bigger than that in conventional grinding (CG), meaning that the ground surface in EUAG is more exquisite and better than that in CG. Therefore, the fractal analysis method has the potential to reveal the ground surface characteristics in EUAG of monocrystal sapphire.",

keywords = "Elliptical ultrasonic assisted grinding (EUAG), Fractal analysis, Grinding, Sapphire, Surface formation characteristics",

author = "Qiuyan Wang and Zhiqiang Liang and Xibin Wang and Wenxiang Zhao and Yongbo Wu and Li Jiao and Tianfeng Zhou",

note = "Publisher Copyright: Copyright {\textcopyright} 2015 by ASME.; ASME 2015 International Manufacturing Science and Engineering Conference, MSEC 2015 ; Conference date: 08-06-2015 Through 12-06-2015",

year = "2015",

doi = "10.1115/MSEC20159300",

language = "English",

series = "ASME 2015 International Manufacturing Science and Engineering Conference, MSEC 2015",

publisher = "American Society of Mechanical Engineers",

booktitle = "Processing",

}

Wang, Q, Liang, Z , Wang, X , Zhao, W, Wu, Y, Jiao, L & Zhou, T 2015, Research on surface formation mechanism in elliptical ultrasonic assisted grinding (EUAG) of monocrystal sapphire using structure function fractal method. in Processing. ASME 2015 International Manufacturing Science and Engineering Conference, MSEC 2015, vol. 1, American Society of Mechanical Engineers, ASME 2015 International Manufacturing Science and Engineering Conference, MSEC 2015, Charlotte, United States, 8/06/15. https://doi.org/10.1115/MSEC20159300

Research on surface formation mechanism in elliptical ultrasonic assisted grinding (EUAG) of monocrystal sapphire using structure function fractal method. / Wang, Qiuyan; Liang, Zhiqiang ; Wang, Xibin et al.
Processing. American Society of Mechanical Engineers, 2015. (ASME 2015 International Manufacturing Science and Engineering Conference, MSEC 2015; Vol. 1).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

TY - GEN

T1 - Research on surface formation mechanism in elliptical ultrasonic assisted grinding (EUAG) of monocrystal sapphire using structure function fractal method

AU - Wang, Qiuyan

AU - Liang, Zhiqiang

AU - Wang, Xibin

AU - Zhao, Wenxiang

AU - Wu, Yongbo

AU - Jiao, Li

AU - Zhou, Tianfeng

PY - 2015

Y1 - 2015

N2 - This study investigates surface formation characteristics in elliptical ultrasonic assisted grinding (EUAG) of monocrystal sapphire using structure function fractal method. During the EUAG process, the workpiece is imposed to ultrasonically vibrate in two directions, i.e., vertical and parallel to work-surface, by using an elliptical ultrasonic vibrator. To clarify the work-surface formation characteristics in EUAG of sapphire material, grinding experiments are carried out involving sapphire substrate. In experiments, work-surface roughness is measured, and the ground work-surface morphology is examined by scanning electron microscope (SEM) and its fractal dimension was calculated by structure function method. The fractal dimension of ground surface in EUAG is bigger than that in conventional grinding (CG), meaning that the ground surface in EUAG is more exquisite and better than that in CG. Therefore, the fractal analysis method has the potential to reveal the ground surface characteristics in EUAG of monocrystal sapphire.

AB - This study investigates surface formation characteristics in elliptical ultrasonic assisted grinding (EUAG) of monocrystal sapphire using structure function fractal method. During the EUAG process, the workpiece is imposed to ultrasonically vibrate in two directions, i.e., vertical and parallel to work-surface, by using an elliptical ultrasonic vibrator. To clarify the work-surface formation characteristics in EUAG of sapphire material, grinding experiments are carried out involving sapphire substrate. In experiments, work-surface roughness is measured, and the ground work-surface morphology is examined by scanning electron microscope (SEM) and its fractal dimension was calculated by structure function method. The fractal dimension of ground surface in EUAG is bigger than that in conventional grinding (CG), meaning that the ground surface in EUAG is more exquisite and better than that in CG. Therefore, the fractal analysis method has the potential to reveal the ground surface characteristics in EUAG of monocrystal sapphire.

KW - Elliptical ultrasonic assisted grinding (EUAG)

KW - Fractal analysis

KW - Grinding

KW - Sapphire

KW - Surface formation characteristics

UR - https://www.scopus.com/pages/publications/84945390886

U2 - 10.1115/MSEC20159300

DO - 10.1115/MSEC20159300

M3 - Conference contribution

AN - SCOPUS:84945390886

T3 - ASME 2015 International Manufacturing Science and Engineering Conference, MSEC 2015

BT - Processing

PB - American Society of Mechanical Engineers

T2 - ASME 2015 International Manufacturing Science and Engineering Conference, MSEC 2015

Y2 - 8 June 2015 through 12 June 2015

ER -

Wang Q, Liang Z , Wang X , Zhao W, Wu Y, Jiao L et al. Research on surface formation mechanism in elliptical ultrasonic assisted grinding (EUAG) of monocrystal sapphire using structure function fractal method. In Processing. American Society of Mechanical Engineers. 2015. (ASME 2015 International Manufacturing Science and Engineering Conference, MSEC 2015). doi: 10.1115/MSEC20159300

Research on surface formation mechanism in elliptical ultrasonic assisted grinding (EUAG) of monocrystal sapphire using structure function fractal method

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Keywords

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