Research on angular vibration calibration devices

In order to improve the evaluating capabilities of dynamic properties for inertial sensors, by loading standard sine wave angular vibration and measuring precisely the angular vibration process, the angular vibration sensor is calibrated. Based on the different frequency specialties, the calibration device is divided to high-frequency and low-frequency two parts. In low-frequency calibration device, an air bearing and brushless direct current torque motor is used. In high-frequency calibration device, a precise air bearing of light hollow cuptype and electromagnetic ariving structure of frame type is designed. Using precise angular encoder measure low-frequency angular vibration and using diffraction grating heterodyne laser interferometer measure high-frequency angular vibration, respectively. A primary angular vibration calibration device with frequency range of 0.25 Hz to 550 Hz, angular acceleration range of 0.1 rad/s² to 1 760 rad/s² and angular velocity wave-distortion below 2% is successfully developed. Compared with the angular vibration calibration device in the Physikalisch-Technische Bundesanstalt, this equipment could provide more load bearing, and could be widely used in dynamic properties tests and evaluating of inertial sensors.