@inproceedings{12afe8e7416e499e97e65200b6ca132f,
title = "Repeatability study of 2D MEMS mirrors based on S-shaped Al/SiO2 bimorphs",
abstract = "MEMS devices based on bimorphs are affected by several effects including creep, stress, and fracture in bimorph structures. In this paper, we present the reliability study of an S-shaped bimorph MEMS mirror. The following tests are performed: 100 million cycle scanning, vibration, and isothermal holding. Only 0.4\% scan angle change was observed after experiencing a 6-axis, 20g vibration. A maximum 0.7\% change was measured after the MEMS mirror gone through an isothermal holding for 10 hours at 150°C. After a 100 million cycles of scanning, the maximum drift was less than 0.01°.",
keywords = "MEMS mirror, bimorph strucure, reliability, repeatability, thermal actuator",
author = "Qiao Chen and Hao Zhang and Xiaoyang Zhang and Dacheng Xu and Huikai Xie",
year = "2013",
doi = "10.1109/NEMS.2013.6559850",
language = "English",
isbn = "9781467363525",
series = "8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2013",
pages = "817--820",
booktitle = "8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2013",
note = "8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2013 ; Conference date: 07-04-2013 Through 10-04-2013",
}