Abstract
We report the first realization of fully-released and relaxed Ge 1-xSnx structures on Ge substrate. The coefficients of Raman peak shift a and b due to the alloy disorder and strain, respectively, were experimentally obtained for Ge1-xSnx. In addition, to lower the Sn composition needed to achieve direct bandgap Ge 1-xSnx alloys and also to realize channel materials with higher electron mobility, uniaxially tensile strained Ge1-xSn x patterns were fabricated. Large tensile strain (>1%) was detected in the patterned Ge1-xSnx lines. Such tensile-strained Ge1-xSnx structures could enable the realization of Group-IV optoelectronic devices and high mobility n-channel transistors.
| Original language | English |
|---|---|
| Pages (from-to) | P138-P145 |
| Journal | ECS Journal of Solid State Science and Technology |
| Volume | 2 |
| Issue number | 4 |
| DOIs | |
| Publication status | Published - 2013 |
| Externally published | Yes |
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