Recent Advances in Flexible RF MEMS

Yingli Shi; Zhigang Shen

doi:10.3390/mi13071088

Recent Advances in Flexible RF MEMS

Yingli Shi
, Zhigang Shen^*

^*Corresponding author for this work

University of Electronic Science and Technology of China
Beihang University

Research output: Contribution to journal › Review article › peer-review

17 Citations (Scopus)

Abstract

Microelectromechanical systems (MEMS) that are based on flexible substrates are widely used in flexible, reconfigurable radio frequency (RF) systems, such as RF MEMS switches, phase shifters, reconfigurable antennas, phased array antennas and resonators, etc. When attempting to accommodate flexible deformation with the movable structures of MEMS, flexible RF MEMS are far more difficult to structurally design and fabricate than rigid MEMS devices or other types of flexible electronics. In this review, we survey flexible RF MEMS with different functions, their flexible film materials and their fabrication process technologies. In addition, a fabrication process for reconfigurable three‐dimensional (3D) RF devices based on mechanically guided assembly is introduced. The review is very helpful to understand the overall advances in flexible RF MEMS, and serves the purpose of providing a reference source for innovative researchers working in this field.

Original language	English
Article number	1088
Journal	Micromachines
Volume	13
Issue number	7
DOIs	https://doi.org/10.3390/mi13071088
Publication status	Published - Jul 2022
Externally published	Yes

Keywords

RF MEMS
RF characteristics
bending deformation
flexible substrate
reconfigurable

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10.3390/mi13071088

Cite this

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title = "Recent Advances in Flexible RF MEMS",

abstract = "Microelectromechanical systems (MEMS) that are based on flexible substrates are widely used in flexible, reconfigurable radio frequency (RF) systems, such as RF MEMS switches, phase shifters, reconfigurable antennas, phased array antennas and resonators, etc. When attempting to accommodate flexible deformation with the movable structures of MEMS, flexible RF MEMS are far more difficult to structurally design and fabricate than rigid MEMS devices or other types of flexible electronics. In this review, we survey flexible RF MEMS with different functions, their flexible film materials and their fabrication process technologies. In addition, a fabrication process for reconfigurable three‐dimensional (3D) RF devices based on mechanically guided assembly is introduced. The review is very helpful to understand the overall advances in flexible RF MEMS, and serves the purpose of providing a reference source for innovative researchers working in this field.",

keywords = "RF MEMS, RF characteristics, bending deformation, flexible substrate, reconfigurable",

author = "Yingli Shi and Zhigang Shen",

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doi = "10.3390/mi13071088",

language = "English",

volume = "13",

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AU - Shi, Yingli

AU - Shen, Zhigang

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PY - 2022/7

Y1 - 2022/7

N2 - Microelectromechanical systems (MEMS) that are based on flexible substrates are widely used in flexible, reconfigurable radio frequency (RF) systems, such as RF MEMS switches, phase shifters, reconfigurable antennas, phased array antennas and resonators, etc. When attempting to accommodate flexible deformation with the movable structures of MEMS, flexible RF MEMS are far more difficult to structurally design and fabricate than rigid MEMS devices or other types of flexible electronics. In this review, we survey flexible RF MEMS with different functions, their flexible film materials and their fabrication process technologies. In addition, a fabrication process for reconfigurable three‐dimensional (3D) RF devices based on mechanically guided assembly is introduced. The review is very helpful to understand the overall advances in flexible RF MEMS, and serves the purpose of providing a reference source for innovative researchers working in this field.

AB - Microelectromechanical systems (MEMS) that are based on flexible substrates are widely used in flexible, reconfigurable radio frequency (RF) systems, such as RF MEMS switches, phase shifters, reconfigurable antennas, phased array antennas and resonators, etc. When attempting to accommodate flexible deformation with the movable structures of MEMS, flexible RF MEMS are far more difficult to structurally design and fabricate than rigid MEMS devices or other types of flexible electronics. In this review, we survey flexible RF MEMS with different functions, their flexible film materials and their fabrication process technologies. In addition, a fabrication process for reconfigurable three‐dimensional (3D) RF devices based on mechanically guided assembly is introduced. The review is very helpful to understand the overall advances in flexible RF MEMS, and serves the purpose of providing a reference source for innovative researchers working in this field.

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KW - RF characteristics

KW - bending deformation

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KW - reconfigurable

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DO - 10.3390/mi13071088

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VL - 13

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Recent Advances in Flexible RF MEMS

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Keywords

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