@inproceedings{b84a795e672145568520d1e11943a846,
title = "Properties of copper film characterized by scanning acoustic microscope",
abstract = "The scanning acoustic microscope is used to detect the properties of film or coating materials. The ultrasonic wave propagates in the materials with thickness h, sound velocity c, acoustic impedance Z2 between medium with acoustic impedance Z1. The echoes from different interfaces overlap and interfere. The interference phenomena are observed in spectrum of echoes. The spectrum has periodic maximums at integral multiples of base frequency f0. When thickness h is known, speed c of the specimen can be calculated by the relation of fn = nc/2h. According to the principle, the properties of copper films such as thickness, acoustic impendence and elastic modulus are detected by scanning acoustic microscopy. The experimental results are accorded with the actual properties of specimens.",
keywords = "Acoustic impendence, Elastic modulus, Film, Scanning acoustic microscopy, Spectrum, Thickness",
author = "Hongjuan Yan and Kai Peng and Chunguang Xu and Qi Lin",
year = "2013",
doi = "10.1109/FENDT.2013.6635544",
language = "English",
isbn = "9781467360180",
series = "FENDT 2013 - Proceedings of 2013 Far East Forum on Nondestructive Evaluation/Testing: New Technology and Application",
pages = "141--144",
booktitle = "FENDT 2013 - Proceedings of 2013 Far East Forum on Nondestructive Evaluation/Testing",
note = "2013 Far East Forum on Nondestructive Evaluation/Testing: New Technology and Application, FENDT 2013 ; Conference date: 17-06-2013 Through 20-06-2013",
}