Abstract
Aspherical optical components and systems are greatly demanded by today's optical industry. However, the manufacturing and metrology of aspheric optics remains a difficult task for opticians. For high precision aspheric mirror's quick fabrication, computer controlled magnetorheological finishing (MRF) has proven to be a reasonable approach. In MRF, magnetically stiffened magnetorheological (MR) abrasive fluid flows through a preset converging gap that is formed by a workpiece surface and a moving rigid wall, to create precise material removal and polishing. Tsinghua University recently completed a project with MRF technology, in which a 66 mm diameter, f/5 parabolic mirror is polished to the shape accuracy of λ/30 rms (working wavelength λ=0.6328 μm) and the surface roughness of 0.6739 nm Ra. In this paper, working processes are designed and experiments are carried out on the features of MRF. The results show that the required convergent speed, surface roughness and figure precision could be achieved with high efficiency.
| Original language | English |
|---|---|
| Pages (from-to) | 6-10 |
| Number of pages | 5 |
| Journal | Materials Science Forum |
| Volume | 471-472 |
| DOIs | |
| Publication status | Published - 2004 |
| Externally published | Yes |
| Event | 11th International Manufacturing Conference - Advances in Materials Manufacturing Science and Technology. - Jinan, China Duration: 18 Sept 2004 → 20 Sept 2004 |
Keywords
- Asphere
- Interferometric testing
- Magnetic dipole
- Magnetorheological finishing