Abstract
By doping Al2O3, the Al-doped ZnO (ZAO) target with ultrahigh relative density (R.D > 99.0% ) was obtained with pressureless sintering. It was due to extremely high surface area of Al2O3 powder, uniform sintering of green compact and avoidance of big pore formation.
Original language | English |
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Pages (from-to) | 44-47 |
Number of pages | 4 |
Journal | Fenmo Yejin Jishu/Powder Metallurgy Technology |
Volume | 23 |
Issue number | 1 |
Publication status | Published - Feb 2005 |
Externally published | Yes |
Keywords
- Nanometer
- Ultrahigh relative density
- ZAO target