Abstract
Li2O-Al2O3 -TiO2-P2O5 thin-film electrolyte was prepared by magnetron sputtering, and the relationship between the performance and the deposition condition was investigated. As seen in the SEM images, the thin films were dense and uniform without cracks, and according to the XRD patterns they had an amorphous structure. The electrochemical performance of the electrolyte was characterized by EIS. An ionic conductivity of 2.6 × 10-6 S/cm at room temperature of them was found from the electrochemical measurement, which appeared as a candidate electrolyte for solid state thin-film lithium batteries, thin-film electrochemical capacitors, micro-sensors, and electro-chromic device and so on.
Original language | English |
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Pages (from-to) | 119-121 |
Number of pages | 3 |
Journal | Yadian Yu Shengguang/Piezoelectrics and Acoustooptics |
Volume | 30 |
Issue number | SUPPL. |
Publication status | Published - Jun 2008 |
Keywords
- LiO-AlO -TiO-PO
- RF magnetron sputtering
- Thin film electrolyte