Plasma Physics-Based Deep Learning Modeling for Accurate Morphology Prediction in Femtosecond Bessel Laser Processing of ZnS

Femtosecond laser processing has become a powerful approach for high-precision micro- and nanofabrication in transparent materials, owing to its ultrashort pulse duration and minimized thermal effects. However, the limited predictability of processing depth remains a major obstacle to practical applications. Here, we present a morphology prediction framework for femtosecond Bessel laser processing of ZnS that integrates plasma physics modeling with deep learning. Through combined experimental measurements and plasma physics simulations, the influence of laser pulse energy on electron density evolution and material removal depth is systematically investigated. The results reveal the dominant roles of multiphoton ionization, avalanche ionization, and free-electron dynamics in deep-volume processing, and demonstrate the strong sensitivity of the processing morphology to the plasma distribution. Conventional plasma models can accurately reproduce the ablation diameter, yet exhibit significant limitations in predicting the processing depth. We propose a physics data-based framework for femtosecond Bessel beam processing, which integrates a depth-residual regression network conditioned on the peak electron density distribution to effectively learn and compensate for systematic modeling errors in plasma-based simulations. This strategy leads to excellent agreement between predicted and experimental processing depths and three-dimensional morphologies under various energy conditions. The model achieves a mean absolute error (MAE) of 4.9 nm at the pixel level for 3D crater reconstruction. Under rigorous crater-grouped cross-validation with Leave-One-Group-Out evaluation, the model achieves a mean R² of 0.74 across 8 independent craters, demonstrating reliable generalization to unseen energy conditions. These results demonstrate that incorporating physical priors into data-driven learning provides an effective pathway to overcoming accuracy limitations in modeling complex laser–matter interactions. This approach offers a reliable tool for quantitative prediction and parameter optimization in deep femtosecond laser processing of transparent materials and enabling highly controllable and reproducible micro- and nanofabrication for advanced photonic and three-dimensional optical applications.