Abstract
In order to obtain stable, large-volume plasmas at high pressures, the characteristics of slit-shaped microhollow cathode discharge (SMHCD) in argon is investigated experimentally. A three-electrode system based on SMHCD is given. The SMHCD acts as the pre-ionization source or plasma cathode. The discharge characteristics of this system are investigated under different conditions. The discharge modes during the process of discharge are also discussed. The results showed that the SMHCD have similar characteristics as the traditional microhollow cathode discharges. The stable glow discharge can be obtained under certain conditions. SMHCD sustained discharge (SMSD) supplies a possible way to generate large-volume, high-pressure plasmas. The SMSD have similar characteristics as the traditional DC glow. The current of the SMHCD and the voltage applied on the third electrode play an important role in the generation of plasma in the outer space of the SMHCD. The system can generate large volume, uniform plasmas.
| Original language | English |
|---|---|
| Pages (from-to) | 1014-1017 |
| Number of pages | 4 |
| Journal | Beijing Ligong Daxue Xuebao/Transaction of Beijing Institute of Technology |
| Volume | 29 |
| Issue number | 11 |
| Publication status | Published - Nov 2009 |
Keywords
- Glow discharge
- Plasma
- Slit-shaped microhollow cathode
- Three-electrode system