TY - JOUR
T1 - Photomechanical meta-molecule array for real-time terahertz imaging
AU - Wen, Yongzheng
AU - Jia, Delin
AU - Ma, Wei
AU - Feng, Yun
AU - Liu, Ming
AU - Dong, Liquan
AU - Zhao, Yuejin
AU - Yu, Xiaomei
N1 - Publisher Copyright:
© The Author(s) 2017.
PY - 2017
Y1 - 2017
N2 - Real-time terahertz (THz) imaging offers remarkable application possibilities, especially in the security and medical fields. However, most THz detectors work with scanners, and a long image acquisition time is required. Some thermal detectors can achieve real-time imaging by using a focal plane array but have the drawbacks of low sensitivity due to a lack of suitable absorbing materials. In this study, we propose a novel photomechanical meta-molecule array by conveniently assembling THz meta-atom absorbers and bi-material cantilevers together, which can couple THz radiation to a mechanical deflection of the meta-molecules with high efficiency. By optically reading out the mechanical deflections of all of the meta-molecules simultaneously, real-time THz imaging can be achieved. A polyimide sacrificial layer technique was developed to fabricate the device on a glass wafer, which facilitates the transmission of a readout light while the THz wave radiates onto the meta-molecule array directly from the front side. THz images and video of various objects as well as infrared images of the human body were captured successfully with the fabricated meta-molecule array. The proposed photomechanical device holds promise in applications in single and broadband THz as well as infrared imaging.
AB - Real-time terahertz (THz) imaging offers remarkable application possibilities, especially in the security and medical fields. However, most THz detectors work with scanners, and a long image acquisition time is required. Some thermal detectors can achieve real-time imaging by using a focal plane array but have the drawbacks of low sensitivity due to a lack of suitable absorbing materials. In this study, we propose a novel photomechanical meta-molecule array by conveniently assembling THz meta-atom absorbers and bi-material cantilevers together, which can couple THz radiation to a mechanical deflection of the meta-molecules with high efficiency. By optically reading out the mechanical deflections of all of the meta-molecules simultaneously, real-time THz imaging can be achieved. A polyimide sacrificial layer technique was developed to fabricate the device on a glass wafer, which facilitates the transmission of a readout light while the THz wave radiates onto the meta-molecule array directly from the front side. THz images and video of various objects as well as infrared images of the human body were captured successfully with the fabricated meta-molecule array. The proposed photomechanical device holds promise in applications in single and broadband THz as well as infrared imaging.
KW - Bi-material cantilever
KW - Meta-atom absorber
KW - Photomechanical meta-molecule array
KW - Polyimide sacrificial layer technique
KW - Terahertz imaging
UR - https://www.scopus.com/pages/publications/85052127017
U2 - 10.1038/micronano.2017.71
DO - 10.1038/micronano.2017.71
M3 - Article
AN - SCOPUS:85052127017
SN - 2055-7434
VL - 3
JO - Microsystems and Nanoengineering
JF - Microsystems and Nanoengineering
M1 - 17071
ER -