Phase and Vibration Analysis for a CMOS-MEMS Gyroscope

Huikai Xie; Gary K. Fedder; Zhiyu Pan; Wilhelm Frey

doi:10.1515/IJNSNS.2002.3.3-4.319

Phase and Vibration Analysis for a CMOS-MEMS Gyroscope

Huikai Xie^*, Gary K. Fedder, Zhiyu Pan, Wilhelm Frey

^*Corresponding author for this work

Research output: Contribution to journal › Article › peer-review

4 Citations (Scopus)

Abstract

Phase is an important issue in a vibratory-rate gyroscope for Coriolis signal demodulation and off-axis motion compensation. This paper uses a simplified three-dimensional comb model to analyze the motion coupling and the phase relation between the Coriolis signal and coupled signals for a lateral-axis CMOS-MEMS gyroscope. It is found that the off-axis motion is highly nonlinear and dominates the coupled motions in the comb-drive actuation. The phase relation was verified experimentally.

Original language	English
Pages (from-to)	319-324
Number of pages	6
Journal	International Journal of Nonlinear Sciences and Numerical Simulation
Volume	3
Issue number	3-4
DOIs	https://doi.org/10.1515/IJNSNS.2002.3.3-4.319
Publication status	Published - 2002
Externally published	Yes

Keywords

CMOS-MEMS
Gyroscope
Motion coupling
Phase
Quadrature

Access to Document

10.1515/IJNSNS.2002.3.3-4.319

Cite this

@article{d486e3be18f443bc955b1915e733427f,

title = "Phase and Vibration Analysis for a CMOS-MEMS Gyroscope",

abstract = "Phase is an important issue in a vibratory-rate gyroscope for Coriolis signal demodulation and off-axis motion compensation. This paper uses a simplified three-dimensional comb model to analyze the motion coupling and the phase relation between the Coriolis signal and coupled signals for a lateral-axis CMOS-MEMS gyroscope. It is found that the off-axis motion is highly nonlinear and dominates the coupled motions in the comb-drive actuation. The phase relation was verified experimentally.",

keywords = "CMOS-MEMS, Gyroscope, Motion coupling, Phase, Quadrature",

author = "Huikai Xie and Fedder, {Gary K.} and Zhiyu Pan and Wilhelm Frey",

year = "2002",

doi = "10.1515/IJNSNS.2002.3.3-4.319",

language = "English",

volume = "3",

pages = "319--324",

journal = "International Journal of Nonlinear Sciences and Numerical Simulation",

issn = "1565-1339",

publisher = "Walter de Gruyter GmbH",

number = "3-4",

}

TY - JOUR

T1 - Phase and Vibration Analysis for a CMOS-MEMS Gyroscope

AU - Xie, Huikai

AU - Fedder, Gary K.

AU - Pan, Zhiyu

AU - Frey, Wilhelm

PY - 2002

Y1 - 2002

N2 - Phase is an important issue in a vibratory-rate gyroscope for Coriolis signal demodulation and off-axis motion compensation. This paper uses a simplified three-dimensional comb model to analyze the motion coupling and the phase relation between the Coriolis signal and coupled signals for a lateral-axis CMOS-MEMS gyroscope. It is found that the off-axis motion is highly nonlinear and dominates the coupled motions in the comb-drive actuation. The phase relation was verified experimentally.

AB - Phase is an important issue in a vibratory-rate gyroscope for Coriolis signal demodulation and off-axis motion compensation. This paper uses a simplified three-dimensional comb model to analyze the motion coupling and the phase relation between the Coriolis signal and coupled signals for a lateral-axis CMOS-MEMS gyroscope. It is found that the off-axis motion is highly nonlinear and dominates the coupled motions in the comb-drive actuation. The phase relation was verified experimentally.

KW - CMOS-MEMS

KW - Gyroscope

KW - Motion coupling

KW - Phase

KW - Quadrature

UR - http://www.scopus.com/inward/record.url?scp=0036328766&partnerID=8YFLogxK

U2 - 10.1515/IJNSNS.2002.3.3-4.319

DO - 10.1515/IJNSNS.2002.3.3-4.319

M3 - Article

AN - SCOPUS:0036328766

SN - 1565-1339

VL - 3

SP - 319

EP - 324

JO - International Journal of Nonlinear Sciences and Numerical Simulation

JF - International Journal of Nonlinear Sciences and Numerical Simulation

IS - 3-4

ER -

Phase and Vibration Analysis for a CMOS-MEMS Gyroscope

Abstract

Keywords

Access to Document

Other files and links

Fingerprint

Cite this