@inproceedings{aca551a2116e4627b1412176d877dd7c,
title = "Permittivity extraction from on-wafer scattering parameters at microwave frequency based on electromagnetic modeling",
abstract = "A new and simple method for determining the permittivity of dielectric materials using electromagnetic modeling is presented in this paper. The permittivity, which is extracted from the on-wafer scattering parameters (S-parameters) of coplanar waveguides (CPWs) with different lengths fabricated in measured substrates, is estimated by comparing the propagation-constants calculated from S-parameters with the one simulated from electromagnetic modeling. Compared to the approach using general analytical calculation, these two approaches have similar accuracy at the frequency range from 1 GHz to 110 GHz for silicon substrate. However, our proposed approach is easier to be implemented.",
keywords = "Coplanar Waveguides, On-wafer, Permittivity, Scattering Parameters",
author = "Xi Ning and Hui Huang and Shuming Chen and Jinying Zhang and Xinmeng Liu and Lei Wang",
note = "Publisher Copyright: {\textcopyright} 2015 IEEE.; IEEE MTT-S International Microwave Workshop Series on Advanced Materials and Processes for RF and THz Applications, IEEE MTT-S IMWS-AMP 2015 ; Conference date: 01-07-2015 Through 03-07-2015",
year = "2015",
month = nov,
day = "10",
doi = "10.1109/IMWS-AMP.2015.7324923",
language = "English",
series = "2015 IEEE MTT-S International Microwave Workshop Series on Advanced Materials and Processes for RF and THz Applications, IEEE MTT-S IMWS-AMP 2015 - Proceedings",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
booktitle = "2015 IEEE MTT-S International Microwave Workshop Series on Advanced Materials and Processes for RF and THz Applications, IEEE MTT-S IMWS-AMP 2015 - Proceedings",
address = "United States",
}