Parametric Model of Differential SAW Pressure Sensor: Enabling Rapid Performance Evaluation and Optimization Design

  • Aobei Chen
  • , Ge Gao
  • , Dapeng Li*
  • , Dezhi Zheng*
  • *Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

Differential Surface Acoustic Wave (SAW) pressure sensors are widely used across various fields. To enable faster and more accurate performance evaluations, we developed a parametric model. This model divides the interdigital transducer (IDT) structure into several microelements and combines it with a small deflection deformation model of the diaphragm, allowing for rapid calculation of sensor performance parameters under different structures. Comparisons with existing experimental results show that the model achieves an accuracy of over 80%. Owing to its computational speed, we applied the model to uncertainty analysis and structural optimization. The results indicate that the width of the IDT has the greatest impact on sensitivity uncertainty. After optimization, the sensitivity increased by a factor of 2.18, and the uncertainty decreased to 60.5% of the original.

Original languageEnglish
Title of host publicationUbiComp Companion 2025 - Companion of the 2025 ACM International Joint Conference on Pervasive and Ubiquitous Computing
EditorsMichael Beigl, Giulio Jacucci, Stephan Sigg, Yu Xiao, Jakob E. Bardram, Eirini Eleni Tsiropoulou, Chenren Xu
PublisherAssociation for Computing Machinery, Inc
Pages1376-1381
Number of pages6
ISBN (Electronic)9798400714771
DOIs
Publication statusPublished - 29 Dec 2025
Event2025 ACM International Joint Conference on Pervasive and Ubiquitous Computing, UbiComp Companion 2025 - Espoo, Finland
Duration: 12 Oct 202516 Oct 2025

Publication series

NameUbiComp Companion 2025 - Companion of the 2025 ACM International Joint Conference on Pervasive and Ubiquitous Computing

Conference

Conference2025 ACM International Joint Conference on Pervasive and Ubiquitous Computing, UbiComp Companion 2025
Country/TerritoryFinland
CityEspoo
Period12/10/2516/10/25

Keywords

  • optimization design
  • parametric model
  • saw pressure sensor
  • uncertainty analysis

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