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Oxidized Ti3C2T xfilm-based high-performance flexible pressure sensors

  • Xiyao Fu
  • , Depeng Wang
  • , Lili Wang*
  • , Hao Xu
  • , Valerii Shulga
  • , Guozhen Shen*
  • , Wei Han*
  • *Corresponding author for this work
  • Jilin University
  • CAS - Institute of Semiconductors
  • University of Chinese Academy of Sciences

Research output: Contribution to journal › Article › peer-review

Abstract

Flexible pressure sensors are the basic building blocks for implementing electronic or tactile skin for robotics, wearable electronic and human-machine interactions. To achieve these potential applications, subtle pressure detection is required under a variety of conditions and is often limited by low sensitivity. Herein, we report an oxidized Ti3C2T x film with outstanding mechanical flexibility via vacuum filtration to assemble a novel flexible pressure sensor. Benefiting from the large deformation of the composite films, the prepared pressure sensor exhibits low detection limits of 8 Pa and fast response/recovery time of 70/20 ms, in addition to excellent cycling stability (10 000 cycles). These novel functions allow us to act as electronic skin to monitor human physiological activity in a personalized manner. Obviously, this good sensing characteristic can highlight the broad prospects of oxidized MXene-based pressure sensors for higher integration of flexible electronic devices.

Original languageEnglish
Article number384002
JournalJournal of Physics D: Applied Physics
Volume54
Issue number38
DOIs
Publication statusPublished - Sept 2021
Externally publishedYes

Keywords

  • TCT
  • high performance
  • mechanical flexibility
  • pressure sensor
  • spontaneous oxidation

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