Opt-electro-mechanical modeling of an electro-thermally actuated analog micromirror

Jianliang Jiang; Yujie Liu; Qiong Sun

doi:10.1109/ICMA.2007.4303876

Opt-electro-mechanical modeling of an electro-thermally actuated analog micromirror

Jianliang Jiang^*, Yujie Liu, Qiong Sun

^*Corresponding author for this work

School of Optics and Photonics

Beijing Institute of Technology

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

Abstract

This paper develops a complete opt-electrothermo-mechanical analytical model for an three-layer electrothermally actuated micromirror, which relates the tilting angle of the micromirror with its driving voltage, the film thickness, the applied load at the tip and relevant parameters of material physical properties. The relative error between analytical model experimental results is less than 20%.

Original language	English
Title of host publication	Proceedings of the 2007 IEEE International Conference on Mechatronics and Automation, ICMA 2007
Pages	2104-2108
Number of pages	5
DOIs	https://doi.org/10.1109/ICMA.2007.4303876
Publication status	Published - 2007
Event	2007 IEEE International Conference on Mechatronics and Automation, ICMA 2007 - Harbin, China Duration: 5 Aug 2007 → 8 Aug 2007

Publication series

Name	Proceedings of the 2007 IEEE International Conference on Mechatronics and Automation, ICMA 2007

Conference

Conference	2007 IEEE International Conference on Mechatronics and Automation, ICMA 2007
Country/Territory	China
City	Harbin
Period	5/08/07 → 8/08/07

Keywords

Micromirror
Opt-electro-mechanic model
Thermal actuator

Access to Document

10.1109/ICMA.2007.4303876

Cite this

Jiang, J., Liu, Y., & Sun, Q. (2007). Opt-electro-mechanical modeling of an electro-thermally actuated analog micromirror. In Proceedings of the 2007 IEEE International Conference on Mechatronics and Automation, ICMA 2007 (pp. 2104-2108). Article 4303876 (Proceedings of the 2007 IEEE International Conference on Mechatronics and Automation, ICMA 2007). https://doi.org/10.1109/ICMA.2007.4303876

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title = "Opt-electro-mechanical modeling of an electro-thermally actuated analog micromirror",

abstract = "This paper develops a complete opt-electrothermo-mechanical analytical model for an three-layer electrothermally actuated micromirror, which relates the tilting angle of the micromirror with its driving voltage, the film thickness, the applied load at the tip and relevant parameters of material physical properties. The relative error between analytical model experimental results is less than 20\%.",

keywords = "Micromirror, Opt-electro-mechanic model, Thermal actuator",

author = "Jianliang Jiang and Yujie Liu and Qiong Sun",

year = "2007",

doi = "10.1109/ICMA.2007.4303876",

language = "English",

isbn = "1424408288",

series = "Proceedings of the 2007 IEEE International Conference on Mechatronics and Automation, ICMA 2007",

pages = "2104--2108",

booktitle = "Proceedings of the 2007 IEEE International Conference on Mechatronics and Automation, ICMA 2007",

note = "2007 IEEE International Conference on Mechatronics and Automation, ICMA 2007 ; Conference date: 05-08-2007 Through 08-08-2007",

}

Jiang, J, Liu, Y & Sun, Q 2007, Opt-electro-mechanical modeling of an electro-thermally actuated analog micromirror. in Proceedings of the 2007 IEEE International Conference on Mechatronics and Automation, ICMA 2007., 4303876, Proceedings of the 2007 IEEE International Conference on Mechatronics and Automation, ICMA 2007, pp. 2104-2108, 2007 IEEE International Conference on Mechatronics and Automation, ICMA 2007, Harbin, China, 5/08/07. https://doi.org/10.1109/ICMA.2007.4303876

Opt-electro-mechanical modeling of an electro-thermally actuated analog micromirror. / Jiang, Jianliang; Liu, Yujie; Sun, Qiong.
Proceedings of the 2007 IEEE International Conference on Mechatronics and Automation, ICMA 2007. 2007. p. 2104-2108 4303876 (Proceedings of the 2007 IEEE International Conference on Mechatronics and Automation, ICMA 2007).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

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AU - Liu, Yujie

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AB - This paper develops a complete opt-electrothermo-mechanical analytical model for an three-layer electrothermally actuated micromirror, which relates the tilting angle of the micromirror with its driving voltage, the film thickness, the applied load at the tip and relevant parameters of material physical properties. The relative error between analytical model experimental results is less than 20%.

KW - Micromirror

KW - Opt-electro-mechanic model

KW - Thermal actuator

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Y2 - 5 August 2007 through 8 August 2007

ER -

Opt-electro-mechanical modeling of an electro-thermally actuated analog micromirror

Abstract

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Keywords

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