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One-time use MEMS metal bridge igniter based electro-explosive solid OFF-ON switch

  • Ding Xuran
  • , Lou Wenzhong*
  • , Li Kang
  • , Zhao Yue
  • , Wang Guilei
  • , Liu Peng
  • *Corresponding author for this work
  • Beijing Institute of Technology
  • Nanjing University of Science and Technology
  • Beijing Institute of Remote Sensing Equipment
  • Chinese Academy of Sciences

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

A novel type of single use bi-stable MEMS solid off-on switch based on metal bridge igniter is described and its performance test results are presented. The switch mechanically connects a couple of comb electrodes which belong separately to different metallic lines. Switching between the two stable states (off and on) is accomplished by a voltage pulse supplied by an energy storage capacitance through a metal bridge igniter above the electrical lines to be connected. The switch can be driven by external signal and its predicted lifetime is very long, therefore the switch can be used for long term store systems.

Original languageEnglish
Title of host publicationMicro-Nano Technology XV
PublisherTrans Tech Publications Ltd.
Pages1289-1292
Number of pages4
ISBN (Print)9783038350712
DOIs
Publication statusPublished - 2014
Event15th Annual Conference and 4th International Conference of the Chinese Society of Micro-Nano Technology, CSMNT 2013 - Tianjin, China
Duration: 3 Nov 20136 Nov 2013

Publication series

NameKey Engineering Materials
Volume609-610
ISSN (Print)1013-9826
ISSN (Electronic)1662-9795

Conference

Conference15th Annual Conference and 4th International Conference of the Chinese Society of Micro-Nano Technology, CSMNT 2013
Country/TerritoryChina
CityTianjin
Period3/11/136/11/13

Keywords

  • MEMS
  • MEMS solid switch
  • Metal bridge

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