On-axis reverse hartmann test in aspheric optical surface test with the optical flat calibration

Zhengzheng Xi; Mei Hui; Zhu Zhao; Ming Liu; Liquan Dong; Xiaohua Liu; Lingqin Kong; Yuejin Zhao

doi:10.1117/12.2236120

On-axis reverse hartmann test in aspheric optical surface test with the optical flat calibration

Zhengzheng Xi
, Mei Hui^*
, Zhu Zhao
, Ming Liu
, Liquan Dong
, Xiaohua Liu
, Lingqin Kong
, Yuejin Zhao

^*Corresponding author for this work

School of Optics and Photonics

Beijing Institute of Technology

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

1 Citation (Scopus)

Abstract

The Reverse Hartmann test is developed rapidly, robustly, and accurately in measuring precision aspheric surface. The onaxis design provides better control of the astigmatism in the test. We use an on-axis Hartmann test in reverse to measure the aspheric optical mirrors. In the configuration, the LCD with a light pattern on the screen illuminates to the tested surface, and a 2ìm-thick pellicle beam splitter is employed to obtain the coaxial light model. An optical flat withλ/20 surface precision is used to calibrate the rays which pass through the external pinhole and image at the detector, and the data are processed to obtain the direction vectors of arbitrary reflected rays. The surface gradients are determined by the spatial equations of incident and reflected rays which have been calibrated. The shape of surface is finally reconstructed by Zernike polynomial fitting. The experiments include measuring a 76.2mm off-axis parabolic mirror and a 76.2mm spherical mirror. The experimental results show coaxial reverse Hartmann test system may allow for accurate measurements with uncertainties in the micrometer range using cost-effective equipments.

Original language	English
Title of host publication	Reflection, Scattering, and Diffraction from Surfaces V
Editors	Leonard M. Hanssen
Publisher	SPIE
ISBN (Electronic)	9781510603134
DOIs	https://doi.org/10.1117/12.2236120
Publication status	Published - 2016
Event	Reflection, Scattering, and Diffraction from Surfaces V - San Diego, United States Duration: 28 Aug 2016 → 29 Aug 2016

Publication series

Name	Proceedings of SPIE - The International Society for Optical Engineering
Volume	9961
ISSN (Print)	0277-786X
ISSN (Electronic)	1996-756X

Conference

Conference	Reflection, Scattering, and Diffraction from Surfaces V
Country/Territory	United States
City	San Diego
Period	28/08/16 → 29/08/16

Keywords

Fringe reflection
On-axis test system
Optical surface measurement
Reverse Hartmann test
Zernike polynomial fitting

Access to Document

10.1117/12.2236120

Cite this

Xi, Z., Hui, M., Zhao, Z., Liu, M., Dong, L., Liu, X., Kong, L., & Zhao, Y. (2016). On-axis reverse hartmann test in aspheric optical surface test with the optical flat calibration. In L. M. Hanssen (Ed.), Reflection, Scattering, and Diffraction from Surfaces V Article 99610T (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 9961). SPIE. https://doi.org/10.1117/12.2236120

@inproceedings{dc28fa706f6c4abeb285e7252601b352,

title = "On-axis reverse hartmann test in aspheric optical surface test with the optical flat calibration",

abstract = "The Reverse Hartmann test is developed rapidly, robustly, and accurately in measuring precision aspheric surface. The onaxis design provides better control of the astigmatism in the test. We use an on-axis Hartmann test in reverse to measure the aspheric optical mirrors. In the configuration, the LCD with a light pattern on the screen illuminates to the tested surface, and a 2{\`i}m-thick pellicle beam splitter is employed to obtain the coaxial light model. An optical flat withλ/20 surface precision is used to calibrate the rays which pass through the external pinhole and image at the detector, and the data are processed to obtain the direction vectors of arbitrary reflected rays. The surface gradients are determined by the spatial equations of incident and reflected rays which have been calibrated. The shape of surface is finally reconstructed by Zernike polynomial fitting. The experiments include measuring a 76.2mm off-axis parabolic mirror and a 76.2mm spherical mirror. The experimental results show coaxial reverse Hartmann test system may allow for accurate measurements with uncertainties in the micrometer range using cost-effective equipments.",

keywords = "Fringe reflection, On-axis test system, Optical surface measurement, Reverse Hartmann test, Zernike polynomial fitting",

author = "Zhengzheng Xi and Mei Hui and Zhu Zhao and Ming Liu and Liquan Dong and Xiaohua Liu and Lingqin Kong and Yuejin Zhao",

note = "Publisher Copyright: {\textcopyright} 2016 SPIE.; Reflection, Scattering, and Diffraction from Surfaces V ; Conference date: 28-08-2016 Through 29-08-2016",

year = "2016",

doi = "10.1117/12.2236120",

language = "English",

series = "Proceedings of SPIE - The International Society for Optical Engineering",

publisher = "SPIE",

editor = "Hanssen, \{Leonard M.\}",

booktitle = "Reflection, Scattering, and Diffraction from Surfaces V",

address = "United States",

}

Xi, Z, Hui, M, Zhao, Z, Liu, M , Dong, L, Liu, X, Kong, L & Zhao, Y 2016, On-axis reverse hartmann test in aspheric optical surface test with the optical flat calibration. in LM Hanssen (ed.), Reflection, Scattering, and Diffraction from Surfaces V., 99610T, Proceedings of SPIE - The International Society for Optical Engineering, vol. 9961, SPIE, Reflection, Scattering, and Diffraction from Surfaces V, San Diego, United States, 28/08/16. https://doi.org/10.1117/12.2236120

On-axis reverse hartmann test in aspheric optical surface test with the optical flat calibration. / Xi, Zhengzheng; Hui, Mei; Zhao, Zhu et al.
Reflection, Scattering, and Diffraction from Surfaces V. ed. / Leonard M. Hanssen. SPIE, 2016. 99610T (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 9961).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

TY - GEN

T1 - On-axis reverse hartmann test in aspheric optical surface test with the optical flat calibration

AU - Xi, Zhengzheng

AU - Hui, Mei

AU - Zhao, Zhu

AU - Liu, Ming

AU - Dong, Liquan

AU - Liu, Xiaohua

AU - Kong, Lingqin

AU - Zhao, Yuejin

PY - 2016

Y1 - 2016

N2 - The Reverse Hartmann test is developed rapidly, robustly, and accurately in measuring precision aspheric surface. The onaxis design provides better control of the astigmatism in the test. We use an on-axis Hartmann test in reverse to measure the aspheric optical mirrors. In the configuration, the LCD with a light pattern on the screen illuminates to the tested surface, and a 2ìm-thick pellicle beam splitter is employed to obtain the coaxial light model. An optical flat withλ/20 surface precision is used to calibrate the rays which pass through the external pinhole and image at the detector, and the data are processed to obtain the direction vectors of arbitrary reflected rays. The surface gradients are determined by the spatial equations of incident and reflected rays which have been calibrated. The shape of surface is finally reconstructed by Zernike polynomial fitting. The experiments include measuring a 76.2mm off-axis parabolic mirror and a 76.2mm spherical mirror. The experimental results show coaxial reverse Hartmann test system may allow for accurate measurements with uncertainties in the micrometer range using cost-effective equipments.

AB - The Reverse Hartmann test is developed rapidly, robustly, and accurately in measuring precision aspheric surface. The onaxis design provides better control of the astigmatism in the test. We use an on-axis Hartmann test in reverse to measure the aspheric optical mirrors. In the configuration, the LCD with a light pattern on the screen illuminates to the tested surface, and a 2ìm-thick pellicle beam splitter is employed to obtain the coaxial light model. An optical flat withλ/20 surface precision is used to calibrate the rays which pass through the external pinhole and image at the detector, and the data are processed to obtain the direction vectors of arbitrary reflected rays. The surface gradients are determined by the spatial equations of incident and reflected rays which have been calibrated. The shape of surface is finally reconstructed by Zernike polynomial fitting. The experiments include measuring a 76.2mm off-axis parabolic mirror and a 76.2mm spherical mirror. The experimental results show coaxial reverse Hartmann test system may allow for accurate measurements with uncertainties in the micrometer range using cost-effective equipments.

KW - Fringe reflection

KW - On-axis test system

KW - Optical surface measurement

KW - Reverse Hartmann test

KW - Zernike polynomial fitting

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U2 - 10.1117/12.2236120

DO - 10.1117/12.2236120

M3 - Conference contribution

AN - SCOPUS:85006992892

T3 - Proceedings of SPIE - The International Society for Optical Engineering

BT - Reflection, Scattering, and Diffraction from Surfaces V

A2 - Hanssen, Leonard M.

PB - SPIE

T2 - Reflection, Scattering, and Diffraction from Surfaces V

Y2 - 28 August 2016 through 29 August 2016

ER -

On-axis reverse hartmann test in aspheric optical surface test with the optical flat calibration

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Keywords

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